Size-effect on stress behavior of the AlN/TiN film

IMR OpenIR

	Size-effect on stress behavior of the AlN/TiN film; Size-effect on stress behavior of the AlN/TiN film
	D. Chen; Y. M. Wang; X. L. Ma
	2009 ; 2009
发表期刊	Acta Materialia ; Acta Materialia
ISSN	1359-6454 ; 1359-6454
卷号	57 期号:8 页码:2576-2582
摘要	The stress behavior of AlN/TiN superlattice film has been studied by means of a crystal-chemical atomic dynamics simulation based oil first-principles calculations. The size-effects oil stress behavior are demonstrated and discussed in detail. Stress behavior depends not only oil AlN thickness but also On structural relaxation and strain distribution in the film. When the AlN thickness exceeds a critical one. the superlattice film is metastable. Stress behavior can be traced to the AlN/TiN interface structure and its variation with strain relaxation.) which may reflect the main strain characteristics caused by AlN structural transformation in this film. (C) 2009 Acta Materialia Inc. Published by elsevier Ltd. All rights reserved.; The stress behavior of AlN/TiN superlattice film has been studied by means of a crystal-chemical atomic dynamics simulation based oil first-principles calculations. The size-effects oil stress behavior are demonstrated and discussed in detail. Stress behavior depends not only oil AlN thickness but also On structural relaxation and strain distribution in the film. When the AlN thickness exceeds a critical one. the superlattice film is metastable. Stress behavior can be traced to the AlN/TiN interface structure and its variation with strain relaxation.) which may reflect the main strain characteristics caused by AlN structural transformation in this film. (C) 2009 Acta Materialia Inc. Published by elsevier Ltd. All rights reserved.
部门归属	[chen, d.; wang, y. m.; ma, x. l.] chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china.;ma, xl (reprint author), chinese acad sci, inst met res, shenyang natl lab mat sci, wenhua rd 72, shenyang 110016, peoples r china;xlma@imr.ac.cn ; [chen, d.; wang, y. m.; ma, x. l.] chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china.;ma, xl (reprint author), chinese acad sci, inst met res, shenyang natl lab mat sci, wenhua rd 72, shenyang 110016, peoples r china;xlma@imr.ac.cn
关键词	Superlattice Superlattice Stress Stress Transformation Transformation Simulation Simulation Chemical Potential Concepts Chemical Potential Concepts Highly Strained Ingaas Highly Strained Ingaas Atomistic Atomistic Simulations Simulations Molecular-dynamics Molecular-dynamics Aluminum Nitride Aluminum Nitride Coherent Growth Coherent Growth Aln Aln Phase Phase Cubic Aln Cubic Aln Superlattices Superlattices Stabilization Stabilization
URL	查看原文 ; 查看原文
WOS记录号	WOS:000265886900023 ; WOS:000265886900023
引用统计	被引频次：3[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/31822
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	D. Chen,Y. M. Wang,X. L. Ma. Size-effect on stress behavior of the AlN/TiN film, Size-effect on stress behavior of the AlN/TiN film[J]. Acta Materialia, Acta Materialia,2009, 2009,57, 57(8):2576-2582, 2576-2582.
APA	D. Chen,Y. M. Wang,&X. L. Ma.(2009).Size-effect on stress behavior of the AlN/TiN film.Acta Materialia,57(8),2576-2582.
MLA	D. Chen,et al."Size-effect on stress behavior of the AlN/TiN film".Acta Materialia 57.8(2009):2576-2582.