Raman Spectra Analysis of Bromine Doped Hydrogenated Amorphous Carbon (a-C : Br : H) Films Deposited by RF-PECVD

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	Raman Spectra Analysis of Bromine Doped Hydrogenated Amorphous Carbon (a-C : Br : H) Films Deposited by RF-PECVD
	J. H. Feng; T. C. Lu; W. D. Wu; P. Jia
	2009
发表期刊	Spectroscopy and Spectral Analysis
ISSN	1000-0593
卷号	29 期号:12 页码:3309-3311
摘要	Bromine doped hydrogenated amorphous carbon (a-C : Br : H) thin films were deposited on silicon wafers by rf. -plasma enhanced chemical vapor deposition (RF-PECVD) with a frequency of 13. 56 MHz at room temperature using pure bromoethane as a precursor of carbon source mixed with hydrogen (H(2)) as a carrier gas. The structures of the films prepared by partial pressure of mixed gas (C(2)H(5)Br/H(2)) were Studied by Raman spectroscopy. The results indicate that the intensity of the Raman D peak is stronger. the Raman G peak positions shift up it little. and the value of I(D)/I(G), increases from 1. 18 to 1. 36, if the gas pressure of mixed C(2)H(5)Br/H(2) is reduced gradually from 20 to 5 Pa. Meanwhile. the growth of thin film turns gradually into low energy mode promoting the transform of sp(2)-C from chains to rings.
部门归属	[feng jian-hong; lu tie-cheng; wu wei-dong] sichuan univ, dept phys, key lab irradiat phys & technol, minist educ, chengdu 610064, peoples r china. [feng jian-hong; jia peng] china acad engn phys, res ctr laser fus, mianyang 621900, peoples r china. [lu tie-cheng] chinese acad sci, int ctr mat phys, shenyang 110015, peoples r china.;wu, wd (reprint author), sichuan univ, dept phys, key lab irradiat phys & technol, minist educ, chengdu 610064, peoples r china;fjhsunwind@sina.com wuweidongding@163.com
关键词	Raman Spectroscopy Rf-pecvd A-c:Br:h Sp(2) Thin-films Diamond Spectroscopy
URL	查看原文
WOS记录号	WOS:000272565300034
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/31898
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	J. H. Feng,T. C. Lu,W. D. Wu,et al. Raman Spectra Analysis of Bromine Doped Hydrogenated Amorphous Carbon (a-C : Br : H) Films Deposited by RF-PECVD[J]. Spectroscopy and Spectral Analysis,2009,29(12):3309-3311.
APA	J. H. Feng,T. C. Lu,W. D. Wu,&P. Jia.(2009).Raman Spectra Analysis of Bromine Doped Hydrogenated Amorphous Carbon (a-C : Br : H) Films Deposited by RF-PECVD.Spectroscopy and Spectral Analysis,29(12),3309-3311.
MLA	J. H. Feng,et al."Raman Spectra Analysis of Bromine Doped Hydrogenated Amorphous Carbon (a-C : Br : H) Films Deposited by RF-PECVD".Spectroscopy and Spectral Analysis 29.12(2009):3309-3311.