Synthesis and elastic properties of V(2)AlC thin films by magnetron sputtering from elemental targets

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	Synthesis and elastic properties of V(2)AlC thin films by magnetron sputtering from elemental targets
	D. P. Sigumonrong; J. Zhang; Y. C. Zhou; D. Music; J. M. Schneider
	2009
发表期刊	Journal of Physics D-Applied Physics
ISSN	0022-3727
卷号	42 期号:18
摘要	The influence of deposition temperature on phase formation of V(2)AlC is studied by magnetron sputtering from elemental targets. At substrate temperatures below 750 degrees C, we observed the formation of Al(x)V(y) and V(2)C using x-ray diffraction (XRD) analysis. At 750 degrees C, a phase pure polycrystalline V(2)AlC film on a similar to 12 nm thick transition layer has been observed using XRD and transmission electron microscopy. Selected area electron diffraction indicates that the film grown on the transition layer consists of phase pure V(2)AlC. As the substrate temperature is increased to 850 degrees C, the formation of V(2)C in addition to the V(2)AlC phase is observed. This may be due to desorption of aluminium causing the decomposition of V(2)AlC into vanadium carbides and aluminium. The V(2)AlC film is fully dense and polycrystalline and the elastic modulus based on nanoindentation is within the expected error margin consistent with previously reported theoretical calculations and the diamond anvil cell measurement of bulk V(2)AlC samples.
部门归属	[sigumonrong, darwin p.; music, denis; schneider, jochen m.] rhein westfal th aachen, d-52074 aachen, germany. [zhang, jie; zhou, yanchun] chinese acad sci, inst met res, shenyang natl lab mat, shenyang 110016, peoples r china. [zhang, jie] chinese acad sci, grad sch, beijing 100039, peoples r china.;sigumonrong, dp (reprint author), rhein westfal th aachen, mies van der rohe str 10, d-52074 aachen, germany
关键词	Initio Molecular-dynamics Chemical-vapor-deposition Augmented-wave Method Mechanical-properties Electronic-properties Transition-metals Ternary Ceramics Vanadium Carbide Gas-mixtures Al-c
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文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/32283
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	D. P. Sigumonrong,J. Zhang,Y. C. Zhou,et al. Synthesis and elastic properties of V(2)AlC thin films by magnetron sputtering from elemental targets[J]. Journal of Physics D-Applied Physics,2009,42(18).
APA	D. P. Sigumonrong,J. Zhang,Y. C. Zhou,D. Music,&J. M. Schneider.(2009).Synthesis and elastic properties of V(2)AlC thin films by magnetron sputtering from elemental targets.Journal of Physics D-Applied Physics,42(18).
MLA	D. P. Sigumonrong,et al."Synthesis and elastic properties of V(2)AlC thin films by magnetron sputtering from elemental targets".Journal of Physics D-Applied Physics 42.18(2009).