Mechanical properties and thermal stability of nitrogen incorporated diamond-like carbon films

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	Mechanical properties and thermal stability of nitrogen incorporated diamond-like carbon films
	Y. S. Zou; Y. F. Wu; R. F. Huang; C. Sun; L. S. Wen
	2009
发表期刊	Vacuum
ISSN	0042-207X
卷号	83 期号:11 页码:1406-1410
摘要	The nitrogen incorporated diamond-like carbon films were deposited on Si (100) substrates by arc ion plating (AIP) under different N(2) content in the gas mixture of Ar and N(2). The influence of N(2) content on the film microstructure and mechanical properties was studied by atomic force microscopy, transmission electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and nanoindentation. It was found that the hardness (H), elastic modulus (E), elastic recovery (R) and plastic resistance parameter (HIE) decrease with increasing the nitrogen content. The decrease of mechanical properties of DLC films resulted from nitrogen incorporation was associated with total sp(3) carbon bond content and N-sp(3)C bond content. The structural modification as well as mechanical properties of the annealed nitrogen incorporated diamond-like carbon films was investigated as a function of annealing temperature. Raman spectra indicate that the I(D)/I(G), ratio starts to increase and G peak position shifts upward at the annealing temperature over 500 degrees C. The hardness and elastic modulus of thermally annealed nitrogen incorporated DLC films decreased slightly at lower annealing temperature and then significantly decreased at higher annealing temperature. The strong covalent bonding between C and N atoms is expected to be effective on their thermal stability enhancement. (C) 2009 Elsevier Ltd. All rights reserved.
部门归属	[zou, y. s.; wu, y. f.] nanjing univ sci & technol, dept mat sci & engn, nanjing 210094, peoples r china. [huang, r. f.; sun, c.; wen, l. s.] chinese acad sci, inst met res, div surface engn mat, shenyang 110016, peoples r china.;zou, ys (reprint author), nanjing univ sci & technol, dept mat sci & engn, nanjing 210094, peoples r china;yshzou75@gmail.com
关键词	Diamond-like Carbon Nitrogen Incorporation Mechanical Properties Thermal Stability Immersion Ion-implantation Chemical-vapor-deposition Amorphous-carbon Thin-films Coatings Microstructure Energy
URL	查看原文
WOS记录号	WOS:000268387800020
引用统计	被引频次：23[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/32646
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Y. S. Zou,Y. F. Wu,R. F. Huang,et al. Mechanical properties and thermal stability of nitrogen incorporated diamond-like carbon films[J]. Vacuum,2009,83(11):1406-1410.
APA	Y. S. Zou,Y. F. Wu,R. F. Huang,C. Sun,&L. S. Wen.(2009).Mechanical properties and thermal stability of nitrogen incorporated diamond-like carbon films.Vacuum,83(11),1406-1410.
MLA	Y. S. Zou,et al."Mechanical properties and thermal stability of nitrogen incorporated diamond-like carbon films".Vacuum 83.11(2009):1406-1410.