Rapid crystallization of sol-gel-deposited lead zirconate titanate thin films by 2.45 GHz microwave irradiation

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	Rapid crystallization of sol-gel-deposited lead zirconate titanate thin films by 2.45 GHz microwave irradiation
	Z. J. Wang; Y. Otsuka; Z. P. Cao; N. Yoshikawa; H. Kokawa
	2008
发表期刊	Japanese Journal of Applied Physics
ISSN	0021-4922
卷号	47 期号:9 页码:7519-7522
摘要	Pb(Zr(0.5)Ti(0.48))O(3) (PZT) thin films were coated onto Pt/Ti/SiO(2)/Si substrates by a sol-gel method and then crystallized by 2.45 GHz microwave irradiation in a magnetic field. The crystalline phases and microstructures as well as the electrical properties of the microwave-irradiated PZT films were investigated as a function of the elevated temperature generated by microwave irradiation. The perovskite PZT thin films with good electrical properties could be obtained by microwave irradiation at 650 C for 60 s. The average values of the remanent polarization and the coercive field of the PZT films were approximately 27 mu C/cm(2) and 95 kV/cm, respectively, whereas the dielectric constant and loss value measured at 1 kHz were approximately 1100 and 0.18. respectively. It is clear that microwave irradiation is effective for obtaining well-crystallized PZT films with good properties in a short process time.
部门归属	[wang, zhan jie] chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china. [wang, zhan jie; otsuka, yuka; cao, ziping; yoshikawa, noboru; kokawa, hiroyuki] tohoku univ, grad sch engn, dept mat sci & engn, sendai, miyagi 9808579, japan.;wang, zj (reprint author), chinese acad sci, inst met res, shenyang natl lab mat sci, 72 wenhua rd, shenyang 110016, peoples r china;wangzj@argon.material.tohoku.ac.jp
关键词	Lead Zirconate Titanate (Pzt) Sol-gel Microwave Irradiation Microstructure Electrical Properties Electrical-properties Laser-ablation Pb Content Microstructures
URL	查看原文
WOS记录号	WOS:000259657800011
引用统计	被引频次：9[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/33174
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Z. J. Wang,Y. Otsuka,Z. P. Cao,et al. Rapid crystallization of sol-gel-deposited lead zirconate titanate thin films by 2.45 GHz microwave irradiation[J]. Japanese Journal of Applied Physics,2008,47(9):7519-7522.
APA	Z. J. Wang,Y. Otsuka,Z. P. Cao,N. Yoshikawa,&H. Kokawa.(2008).Rapid crystallization of sol-gel-deposited lead zirconate titanate thin films by 2.45 GHz microwave irradiation.Japanese Journal of Applied Physics,47(9),7519-7522.
MLA	Z. J. Wang,et al."Rapid crystallization of sol-gel-deposited lead zirconate titanate thin films by 2.45 GHz microwave irradiation".Japanese Journal of Applied Physics 47.9(2008):7519-7522.