Investigation of correlation between the microstructure and electrical properties of sol-gel derived ZnO based thin films

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	Investigation of correlation between the microstructure and electrical properties of sol-gel derived ZnO based thin films
	M. W. Zhu; J. Gong; C. Sun; J. H. Xia; X. Jiang
	2008
发表期刊	Journal of Applied Physics
ISSN	0021-8979
卷号	104 期号:7
摘要	Pure ZnO and aluminum doped ZnO films (ZAO) were prepared by sol-gel method and the effect of Al doping on the microstructure and electrical properties of the films was investigated. The results showed that the transformation from granular to columnar structure could be observed in pure ZnO films with the increase in heating time while in aluminum doped films little structural changes occurred even after a prolonged heating time. Additionally, measurements of electrical properties showed that both microstructural evolution and doping could significantly improve the conductivity of the films, which could be assigned to an increase both in Hall mobility and carrier concentration. The relationship between microstructure and the electrical properties of the films was discussed, and various scattering mechanisms were proposed for sol-gel derived ZnO and ZAO films as a function of the carrier concentration. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.2993978]
部门归属	[zhu, m. w.; gong, j.; sun, c.] chinese acad sci, inst met res, state key lab corros & protect, shenyang 110016, peoples r china. [xia, j. h.; jiang, x.] univ siegen, inst mat engn, d-57076 siegen, germany.;sun, c (reprint author), chinese acad sci, inst met res, state key lab corros & protect, wenhua rd 72, shenyang 110016, peoples r china;csun@imr.ac.cn
关键词	Doped Zinc-oxide Crystallization Behavior Polycrystalline Transparent Al Semiconductors Transport Sapphire Pressure Rf
URL	查看原文
WOS记录号	WOS:000260125500014
引用统计	被引频次：46[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/33407
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	M. W. Zhu,J. Gong,C. Sun,et al. Investigation of correlation between the microstructure and electrical properties of sol-gel derived ZnO based thin films[J]. Journal of Applied Physics,2008,104(7).
APA	M. W. Zhu,J. Gong,C. Sun,J. H. Xia,&X. Jiang.(2008).Investigation of correlation between the microstructure and electrical properties of sol-gel derived ZnO based thin films.Journal of Applied Physics,104(7).
MLA	M. W. Zhu,et al."Investigation of correlation between the microstructure and electrical properties of sol-gel derived ZnO based thin films".Journal of Applied Physics 104.7(2008).