Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling

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	Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling
	H. Hua; X. Hui-Min; G. Zhi-Qiang; L. Qiang; G. Chang-Zhi; Q. Hai-Chang; R. Li-Jian
	2007
发表期刊	Chinese Physics Letters
ISSN	0256-307X
卷号	24 期号:9 页码:2521-2524
摘要	A focused gallium ion (Ga+) beam is used to fabricate micro/submicron spacing gratings on the surface of porous NiTi shape memory alloy (SMA). The crossing type of gratings with double-frequency (2500 l/mm and 5000 l/mm) using the focused ion beam (FIB) milling are successfully produced in a combination mode or superposition mode. Based on the double-frequency gratings, high-quality scanning electron microscopy (SEM) Moire patterns are obtained to study the micro-scale deformation of porous NiTi SMA. The grating fabrication technique is discussed in detail. The experimental results verify the feasibility of fabricating high frequency grating on metal surface using FIB milling.
部门归属	tsing hua univ, fml, dept engn mech, beijing 100084, peoples r china. chinese acad sci, inst phys, beijing 100080, peoples r china. chinese acad sci, inst met res, shenyang 110016, peoples r china.;hui-min, x (reprint author), tsing hua univ, fml, dept engn mech, beijing 100084, peoples r china;xiehm@mail.tsinghua.edu.cn
URL	查看原文
WOS记录号	WOS:000248961100016
引用统计	被引频次：3[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/33591
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	H. Hua,X. Hui-Min,G. Zhi-Qiang,et al. Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling[J]. Chinese Physics Letters,2007,24(9):2521-2524.
APA	H. Hua.,X. Hui-Min.,G. Zhi-Qiang.,L. Qiang.,G. Chang-Zhi.,...&R. Li-Jian.(2007).Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling.Chinese Physics Letters,24(9),2521-2524.
MLA	H. Hua,et al."Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling".Chinese Physics Letters 24.9(2007):2521-2524.