Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy

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	Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy
	F. X. Liu; K. L. Yao; Z. L. Liu
	2007
发表期刊	Diamond and Related Materials
ISSN	0925-9635
卷号	16 期号:9 页码:1746-1751
摘要	Diamond-like carbon (DLC) films form a critical protective layer on magnetic hard disks and their reading heads. Now tetrahedral amorphous carbon films (ta-C) thickness of 2 nm are becoming the preferred means due to the highly spa content. In this paper, Raman spectra at visible and ultraviolet excitation of ta-C films have been studied as a function of substrate bias voltage. The spectra show that the spa content of 70 nm thick DLC films increases with higher substrate bias, while spa content of 2 nm ultra-thin films falls almost linearly with bias increment. And this is also consistent with the hardness measurement of 70 nm thick films. We proposed that substrate bias enhances mixing between the carbon films and either the Si films or Al(2)O(3)TiC substrate such that thin films contain less spa fraction. These mixing bonds are longer than C-C bonds, which inducing the hardness decreasing of ultra-thin DLC films with bias. But for 70 nm DLC, the effect of mixing layer can be negligible by compared to bias effect with higher carbon ion energy. So spa content will increase for thick films with substrate bias. (c) 2007 Elsevier B.V. All tights reserved.
部门归属	huazhong univ sci & technol, dept phys, wuhan 430074, peoples r china. chinese acad sci, int ctr mat phys, shenyang 110016, peoples r china.;liu, fx (reprint author), huazhong univ sci & technol, dept phys, 1037 luoyu rd, wuhan 430074, peoples r china;lfx63@163.com
关键词	Ta-c Films Substrate Bias Sp(3) Content Raman Spectroscopy Mixing Bonds Diamond-like Carbon Chemical-vapor-deposition Cathodic Vacuum-arc Tribological Properties Dlc Films Mechanical-properties Thin-films Nitride Ultraviolet Coatings
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WOS记录号	WOS:000249539300009
引用统计	被引频次：36[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/33694
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	F. X. Liu,K. L. Yao,Z. L. Liu. Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy[J]. Diamond and Related Materials,2007,16(9):1746-1751.
APA	F. X. Liu,K. L. Yao,&Z. L. Liu.(2007).Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy.Diamond and Related Materials,16(9),1746-1751.
MLA	F. X. Liu,et al."Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy".Diamond and Related Materials 16.9(2007):1746-1751.