Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy

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	Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy; Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy
	F. X. Liu; K. L. Yao; Z. L. Liu
	2007 ; 2007
发表期刊	Surface & Coatings Technology ; Surface & Coatings Technology
ISSN	0257-8972 ; 0257-8972
卷号	201 期号:16-17 页码:7235-7240
摘要	Raman spectra at visible and ultraviolet excitation of tetrahedral amorphous carbon (ta-C) films have been studied as a function of oblique angles of substrates while keeping the energy of incident particles stable. The substrate angle is varied from 0 to 60 degrees. The spectra show that the films contain less sp 3 content and more ordered sp 2 clustering as the substrate tilting angle increases from 0 to 60 degrees for thicker films of 70 rim, and also a decrease of sp 3 content for thinner films of 2 rim from 0 to 45 degrees. Raman data indicates the substrate tilting can dramatically lower internal stress while having less influence on hardness because hardness is related to sp(3) content, but internal stress is related to not only sp(3) content but the order of sp 2 cluster. And this is also consistent with the measurement of hardness and internal stress for thicker films of 70 nm. The implications of these results on the mechanisms proposed for the film formation were discussed. lt can provide a way for film application in magnetic recording slider that requires less internal stress and suitable hardness. (C) 2007 Elsevier B.V. All rights reserved.; Raman spectra at visible and ultraviolet excitation of tetrahedral amorphous carbon (ta-C) films have been studied as a function of oblique angles of substrates while keeping the energy of incident particles stable. The substrate angle is varied from 0 to 60 degrees. The spectra show that the films contain less sp 3 content and more ordered sp 2 clustering as the substrate tilting angle increases from 0 to 60 degrees for thicker films of 70 rim, and also a decrease of sp 3 content for thinner films of 2 rim from 0 to 45 degrees. Raman data indicates the substrate tilting can dramatically lower internal stress while having less influence on hardness because hardness is related to sp(3) content, but internal stress is related to not only sp(3) content but the order of sp 2 cluster. And this is also consistent with the measurement of hardness and internal stress for thicker films of 70 nm. The implications of these results on the mechanisms proposed for the film formation were discussed. lt can provide a way for film application in magnetic recording slider that requires less internal stress and suitable hardness. (C) 2007 Elsevier B.V. All rights reserved.
部门归属	huazhong univ sci & technol, dept phys, wuhan 430074, peoples r china. chinese acad sci, int ctr mat phys, shenyang 11016, peoples r china. int ctr sci, shenyang 11016, peoples r china.;liu, fx (reprint author), huazhong univ sci & technol, dept phys, luoyu rd, wuhan 430074, peoples r china;lfx63@163.com ; huazhong univ sci & technol, dept phys, wuhan 430074, peoples r china. chinese acad sci, int ctr mat phys, shenyang 11016, peoples r china. int ctr sci, shenyang 11016, peoples r china.;liu, fx (reprint author), huazhong univ sci & technol, dept phys, luoyu rd, wuhan 430074, peoples r china;lfx63@163.com
关键词	Tetrahedral Amorphous Carbon Films Tetrahedral Amorphous Carbon Films Raman Spectra Raman Spectra Substrate Tilting Substrate Tilting Angle Angle Internal Stress Internal Stress Hardness Hardness Diamond-like Carbon Diamond-like Carbon Cathodic Vacuum-arc Cathodic Vacuum-arc Mechanical-properties Mechanical-properties Coatings Coatings Ultraviolet Ultraviolet Deposition Deposition
URL	查看原文 ; 查看原文
WOS记录号	WOS:000246509800045 ; WOS:000246509800045
引用统计	被引频次：13[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/33697
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	F. X. Liu,K. L. Yao,Z. L. Liu. Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy, Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy[J]. Surface & Coatings Technology, Surface & Coatings Technology,2007, 2007,201, 201(16-17):7235-7240, 7235-7240.
APA	F. X. Liu,K. L. Yao,&Z. L. Liu.(2007).Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy.Surface & Coatings Technology,201(16-17),7235-7240.
MLA	F. X. Liu,et al."Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy".Surface & Coatings Technology 201.16-17(2007):7235-7240.