Role of oxygen desorption during vacuum annealing in the improvement of electrical properties of aluminum doped zinc oxide films synthesized by sol gel method

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	Role of oxygen desorption during vacuum annealing in the improvement of electrical properties of aluminum doped zinc oxide films synthesized by sol gel method
	M. W. Zhu; H. Huang; J. Gong; C. Sun; X. Jiang
	2007
发表期刊	Journal of Applied Physics
ISSN	0021-8979
卷号	102 期号:4
摘要	Aluminum doped zinc oxide (ZAO) films were prepared by sol gel dip-coating process. Several annealing treatments were carried out to improve the conductivity of ZAO films. The results show that the annealing temperature and the cooling rate have significant effects on the resistivity of ZAO films. A minimum resistivity of 5.97x10(-3) Omega cm with the transmission in visible light region above 85% can be obtained after vacuum annealing. The desorption of oxygen that is chemisorbed on the surface and at the grain boundary is thought to be responsible for the observed improvement.
部门归属	chinese acad sci, inst met res, shenyang, peoples r china. univ siegen, inst mat engn, d-57076 siegen, germany.;jiang, x (reprint author), chinese acad sci, inst met res, wenhua rd 72, shenyang, peoples r china;xin.jiang@uni-siegen.de
关键词	Zno Thin-films Spray Pyrolysis Transparent Magnetron Devices
URL	查看原文
WOS记录号	WOS:000249156200006
引用统计	被引频次：33[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/34111
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	M. W. Zhu,H. Huang,J. Gong,et al. Role of oxygen desorption during vacuum annealing in the improvement of electrical properties of aluminum doped zinc oxide films synthesized by sol gel method[J]. Journal of Applied Physics,2007,102(4).
APA	M. W. Zhu,H. Huang,J. Gong,C. Sun,&X. Jiang.(2007).Role of oxygen desorption during vacuum annealing in the improvement of electrical properties of aluminum doped zinc oxide films synthesized by sol gel method.Journal of Applied Physics,102(4).
MLA	M. W. Zhu,et al."Role of oxygen desorption during vacuum annealing in the improvement of electrical properties of aluminum doped zinc oxide films synthesized by sol gel method".Journal of Applied Physics 102.4(2007).