Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates

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	Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates; Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates
	S. L. Chen; W. Liu; Z. D. Zhang
	2006 ; 2006
发表期刊	Journal of Magnetism and Magnetic Materials ; Journal of Magnetism and Magnetic Materials
ISSN	0304-8853 ; 0304-8853
卷号	302 期号:2 页码:306-309
摘要	Anisotropic Nd-Fe-B thin films with c-axis texture are fabricated by DC magnetron sputtering on heated Si substrates. The influences of deposition rate (DR) on the microstructure and magnetic properties of Nd-Fe-B thin films are investigated. It is found that the atomic ratio of Nd/Fe in Nd-Fe-B thin films is sensitive to DR, hence resulting in a change in magnetic properties. With increasing DR, the Nd/ Fe atomic ratio increases monotonically. For the films sputtered at low DRs (<= 0.5 nm/s), low coercivities are observed due to the existence of alpha-Fe or an absence of Nd-rich phase. Further increasing the DR (>=,0.6 tim/s) results in a significant increase of coercivity Lip to 14.5 kOe, because the hard-magnetic Nd2Fe14B phase coexists with the Nd-rich phase in the films. Size of the surface grains increases with increasing DR, and for the films prepared at a high DR (>= 0.6 nm/s), some island-like big grains appear on the film surface, which are correlated with the Nd-rich phase. (c) 2005 Elsevier B.V. All rights reserved.; Anisotropic Nd-Fe-B thin films with c-axis texture are fabricated by DC magnetron sputtering on heated Si substrates. The influences of deposition rate (DR) on the microstructure and magnetic properties of Nd-Fe-B thin films are investigated. It is found that the atomic ratio of Nd/Fe in Nd-Fe-B thin films is sensitive to DR, hence resulting in a change in magnetic properties. With increasing DR, the Nd/ Fe atomic ratio increases monotonically. For the films sputtered at low DRs (<= 0.5 nm/s), low coercivities are observed due to the existence of alpha-Fe or an absence of Nd-rich phase. Further increasing the DR (>=,0.6 tim/s) results in a significant increase of coercivity Lip to 14.5 kOe, because the hard-magnetic Nd2Fe14B phase coexists with the Nd-rich phase in the films. Size of the surface grains increases with increasing DR, and for the films prepared at a high DR (>= 0.6 nm/s), some island-like big grains appear on the film surface, which are correlated with the Nd-rich phase. (c) 2005 Elsevier B.V. All rights reserved.
部门归属	chinese acad sci, shenyang natl lab mat sci, inst met res, shenyang 110016, peoples r china. chinese acad sci, int ctr mat res, shenyang 110016, peoples r china.;chen, sl (reprint author), chinese acad sci, shenyang natl lab mat sci, inst met res, 72 wenhua rd, shenyang 110016, peoples r china;slchen@irnr.ac.cn ; chinese acad sci, shenyang natl lab mat sci, inst met res, shenyang 110016, peoples r china. chinese acad sci, int ctr mat res, shenyang 110016, peoples r china.;chen, sl (reprint author), chinese acad sci, shenyang natl lab mat sci, inst met res, 72 wenhua rd, shenyang 110016, peoples r china;slchen@irnr.ac.cn
关键词	Thin Film Thin Film Ndfeb Ndfeb Crystalline Texture Crystalline Texture Structure And Magnetic Properties Structure And Magnetic Properties
URL	查看原文 ; 查看原文
WOS记录号	WOS:000237009000008 ; WOS:000237009000008
引用统计	被引频次：18[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/34152
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	S. L. Chen,W. Liu,Z. D. Zhang. Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates, Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates[J]. Journal of Magnetism and Magnetic Materials, Journal of Magnetism and Magnetic Materials,2006, 2006,302, 302(2):306-309, 306-309.
APA	S. L. Chen,W. Liu,&Z. D. Zhang.(2006).Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates.Journal of Magnetism and Magnetic Materials,302(2),306-309.
MLA	S. L. Chen,et al."Microstructure and magnetic properties of anisotropic Nd-Fe-B thin films fabricated with different deposition rates".Journal of Magnetism and Magnetic Materials 302.2(2006):306-309.