Optical properties of ultrathin aluminum films deposited by magnetron sputtering in visible band

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	Optical properties of ultrathin aluminum films deposited by magnetron sputtering in visible band
	H. Du; J. Q. Xiao; Y. S. Zou; T. G. Wang; J. Gong; C. Sun; L. S. Wen
	2006
发表期刊	Optical Materials
ISSN	0925-3467
卷号	28 期号:8-9 页码:944-949
摘要	A set of ultrathin aluminum films deposited by direct current (DC) magnetron sputtering were studied on optical properties in the visible band ex situ. The contaminated surface layer were studied on thickness by X-ray photoelectron spectroscopy (XPS), as well as its influence on reflectivity and transmittivity of these films by scanning spectrophotometer. The optical constant and permittivity were calculated from the measured reflectivity and transmittivity of these films. All results show that the optical properties depend on the film thickness. Comparison between the experimental results and the simulation based on Maxwell-Garnett model of effective medium theory (EMT) on permittivity indicates the essential underlying role of microstructure in the optical properties of the ultrathin aluminum films. (C) 2005 Elsevier B.V. All rights reserved.
部门归属	chinese acad sci, inst met res, div surface engn mat, shenyang 110016, peoples r china.;du, h (reprint author), chinese acad sci, inst met res, div surface engn mat, shenyang 110016, peoples r china;hdu@imr.ac.cn
关键词	Ultrathin Aluminum Film Reflectivity Transmittivity Optical Constant Permittivity Effective Medium Theory Copper-films Gold
URL	查看原文
WOS记录号	WOS:000237871200009
引用统计	被引频次：20[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/34182
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	H. Du,J. Q. Xiao,Y. S. Zou,et al. Optical properties of ultrathin aluminum films deposited by magnetron sputtering in visible band[J]. Optical Materials,2006,28(8-9):944-949.
APA	H. Du.,J. Q. Xiao.,Y. S. Zou.,T. G. Wang.,J. Gong.,...&L. S. Wen.(2006).Optical properties of ultrathin aluminum films deposited by magnetron sputtering in visible band.Optical Materials,28(8-9),944-949.
MLA	H. Du,et al."Optical properties of ultrathin aluminum films deposited by magnetron sputtering in visible band".Optical Materials 28.8-9(2006):944-949.