Initial growth of nanocrystalline diamond/beta-SiC composite films: A competitive deposition process

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	Initial growth of nanocrystalline diamond/beta-SiC composite films: A competitive deposition process
	Vvss Srikanth; M. H. Tan; X. Jiang
	2006
发表期刊	Applied Physics Letters
ISSN	0003-6951
卷号	88 期号:7
摘要	Although nanocrystalline diamond/beta-SiC composite gradient interlayers have been successfully deposited in dealing with the problem of diamond thin-film adhesion to metallic substrates, initial growth process of the two components has not been described, so far. In this letter, we propose that the deposition of composite interlayer is possible because of a selective growth process of diamond and beta-SiC phases. There is a competition between the diamond and the beta-SiC crystallites to occupy the spaces available on the substrate. The space competition is during the initial nucleation period of the process and also during film growth, leading to the formation of the nanocrystalline composite. The secondary nucleation of beta-SiC on the existing diamond surfaces depends on the flux of incoming beta-SiC forming gas species. This provides us with a possibility to control phase structure and composition of the composite film by adjusting the tetramethyl silane flow rate.
部门归属	univ siegen, inst mat engn, d-57076 siegen, germany. chinese acad sci, inst met res, shenyang 1100016, peoples r china.;jiang, x (reprint author), univ siegen, inst mat engn, paul bonatz str 9-11, d-57076 siegen, germany;xin.jiang@uni-siegen.de
关键词	Chemical-vapor-deposition Silicon-carbide Thin-films Coatings Steel Interlayer Adhesion Carbon
URL	查看原文
WOS记录号	WOS:000235393700090
引用统计	被引频次：38[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/34461
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Vvss Srikanth,M. H. Tan,X. Jiang. Initial growth of nanocrystalline diamond/beta-SiC composite films: A competitive deposition process[J]. Applied Physics Letters,2006,88(7).
APA	Vvss Srikanth,M. H. Tan,&X. Jiang.(2006).Initial growth of nanocrystalline diamond/beta-SiC composite films: A competitive deposition process.Applied Physics Letters,88(7).
MLA	Vvss Srikanth,et al."Initial growth of nanocrystalline diamond/beta-SiC composite films: A competitive deposition process".Applied Physics Letters 88.7(2006).