Determination of proof stress and strain-hardening exponent for thin film with biaxial residual stresses by in-situ XRD stress analysis combined with tensile test

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	Determination of proof stress and strain-hardening exponent for thin film with biaxial residual stresses by in-situ XRD stress analysis combined with tensile test
	M. Qin; V. Ji; Y. N. Wu; C. R. Chen; J. B. Li
	2005
发表期刊	Surface & Coatings Technology
ISSN	0257-8972
卷号	192 期号:2-3 页码:139-144
摘要	A new method is put forward to measure the proof stress and strain-hardening exponent of polycrystalline films (Cu, TiN) under a biaxial residual stresses state on the substrates. The Cu and TiN films were deposited on the steel substrates by ion beam-assisted magnetron sputtering and plasma-assisted chemical vapor deposition (PACVD), respectively. During the tensile test, the longitudinal stress (sigma(1)) and transverse stress (sigma(2)) of the films were determined by in-situ X-ray diffraction, and the applied strain (epsilon(a)) of the films were measured by a strain gauge. Based on the experimental results, the equivalent stresses sigma and equivalent uniaxial strains epsilon(t) can be obtained. From the sigma-epsilon(t) curves, the proof stresses sigma(0.1) of the Cu and TiN films have been calculated. The results indicate that the values of sigma(0.1) of the Cu and TiN films are 328 MPa and 4.2 GPa, respectively, and the values of the strain-hardening exponents for them are 0.62 and 0.36, respectively. In addition, evidence that the plastic flow of TiN film occurred under the tensile load is also obtained. (C) 2004 Published by Elsevier B.V.
部门归属	chinese acad sci, inst met res, shenyang natl lab mat sci synl, shenyang 110016, peoples r china. ensam, lm3 esa, cnrs 8006, f-75013 paris, france. chinese acad sci, inst met res, dept surface engn mat, shenyang 110016, peoples r china.;qin, m (reprint author), saitama inst technol, adv sci inst, fusaiji 1690, okabe, saitama 3690293, japan;mqin@sit.ac.jp
关键词	Proof Stress Strain-hardening Exponent Biaxial Stresses Cu Film Tin Film Tensile Test In-situ X-ray Diffraction Alloy
URL	查看原文
WOS记录号	WOS:000226842700002
引用统计	被引频次：16[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/35007
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	M. Qin,V. Ji,Y. N. Wu,et al. Determination of proof stress and strain-hardening exponent for thin film with biaxial residual stresses by in-situ XRD stress analysis combined with tensile test[J]. Surface & Coatings Technology,2005,192(2-3):139-144.
APA	M. Qin,V. Ji,Y. N. Wu,C. R. Chen,&J. B. Li.(2005).Determination of proof stress and strain-hardening exponent for thin film with biaxial residual stresses by in-situ XRD stress analysis combined with tensile test.Surface & Coatings Technology,192(2-3),139-144.
MLA	M. Qin,et al."Determination of proof stress and strain-hardening exponent for thin film with biaxial residual stresses by in-situ XRD stress analysis combined with tensile test".Surface & Coatings Technology 192.2-3(2005):139-144.