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The preparation of ZnO based gas-sensing thin films by ink-jet printing method
W. F. Shen; Y. Zhao; C. B. Zhang
2005
发表期刊Thin Solid Films
ISSN0040-6090
卷号483期号:1-2页码:382-387
摘要An ink-jet printing technique was applied to prepare ZnO based gas-sensing thin films. ZnO inks with appropriate viscosity and surface tension were prepared by sol-gel techniques, and printed onto substrates using a commercial printer. After the drying and heating treatment processes, continuous ZnO films were formed and studied by scanning electron microscopy, X-ray diffraction and by a home-made gas sensitivity measuring system. It was found that the morphology and electrical properties of the films changed significantly with the thickness of the films, which can be adjusted simply by printing on the film with increasing frequency. Highest resistance and sensitivity to acetone vapor were obtained when the film was prepared by printing only once on it. Different dopants with certain concentrations could be added into the films by printing with different dopant inks and printing frequency. All Pd, Ag, and ZrO2 dopants increased both the resistivity and the sensitivity of the films (180 ppm acetone). This work showed that the ink-jet printing technique was a convenient and low cost method to prepare films with controlled film thickness and dopant concentration. (c) 2005 Elsevier B.V. All rights reserved.
部门归属chinese acad sci, inst met res, shenyang 110016, peoples r china. northeastern univ, coll sci, shenyang 110004, peoples r china.;zhao, y (reprint author), chinese acad sci, inst met res, 72 wenhua rd, shenyang 110016, peoples r china;yanzhao@imr.ac.cn
关键词Zinc Oxide Sensors Ink-jet Printing Scanning Electron Microscopy Deposition Sensors Fabrication Devices Layer
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WOS记录号WOS:000229681700062
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被引频次:108[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/35024
专题中国科学院金属研究所
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W. F. Shen,Y. Zhao,C. B. Zhang. The preparation of ZnO based gas-sensing thin films by ink-jet printing method[J]. Thin Solid Films,2005,483(1-2):382-387.
APA W. F. Shen,Y. Zhao,&C. B. Zhang.(2005).The preparation of ZnO based gas-sensing thin films by ink-jet printing method.Thin Solid Films,483(1-2),382-387.
MLA W. F. Shen,et al."The preparation of ZnO based gas-sensing thin films by ink-jet printing method".Thin Solid Films 483.1-2(2005):382-387.
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