Preparation and characterization of Al and Mn doped ZnO (ZnO : (Al, Mn)) transparent conducting oxide films

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	Preparation and characterization of Al and Mn doped ZnO (ZnO : (Al, Mn)) transparent conducting oxide films
	H. T. Cao; Z. L. Pei; J. Gong; C. Sun; R. F. Huang; L. S. Wen
	2004
发表期刊	Journal of Solid State Chemistry
ISSN	0022-4596
卷号	177 期号:4-5 页码:1480-1487
摘要	This paper presents the electro-optical, chemical and structural properties of doped-ZnO films deposited by DC-reactive magnetron sputtering at room temperature using the bi-dopant Al and Mn. A minimum resistivity of 3.46 x 10(-4) Omegacm, exceeding 75.0% average transmittance (380-800nm), and fundamental band gap of 3.48 +/- 0.01 eV have been obtained. XPS analyses show that Zn uniformly remains in the valence state of Zn2+; all of the Al and a little amount of Mn with valence state of Mn4+ are supposed to have donor effect, while dominant Mn2+ will induce to form more oxygen vacancies and this proposal has been verified by O 1s XPS results. It has been concluded that the presence of more oxygen vacancies will attenuate the effect of hybridization of p-d orbitals in the matrix of ZnO. It has been found that all the as-deposited films have c-axis preferred orientation with flat and smooth surface (RMS surface roughness is of the order of similar to 3 nm over 5 x 5 mum(2) area). (C) 2003 Elsevier Inc. All rights reserved.
部门归属	chinese acad sci, inst met res, dept surface engn mat, shenyang 110016, peoples r china.;cao, ht (reprint author), chinese acad sci, inst met res, dept surface engn mat, shenyang 110016, peoples r china;htcao@imr.ac.cn csun@imr.ac.cn
关键词	Dc Reactive Niagnetron Sputtering Transparent Conducting Oxide Electro-optical Properties Xps Structural Properties Zinc-oxide Highly Transparent Semiconductors
URL	查看原文
WOS记录号	WOS:000220635800056
引用统计	被引频次：90[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/35314
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	H. T. Cao,Z. L. Pei,J. Gong,et al. Preparation and characterization of Al and Mn doped ZnO (ZnO : (Al, Mn)) transparent conducting oxide films[J]. Journal of Solid State Chemistry,2004,177(4-5):1480-1487.
APA	H. T. Cao,Z. L. Pei,J. Gong,C. Sun,R. F. Huang,&L. S. Wen.(2004).Preparation and characterization of Al and Mn doped ZnO (ZnO : (Al, Mn)) transparent conducting oxide films.Journal of Solid State Chemistry,177(4-5),1480-1487.
MLA	H. T. Cao,et al."Preparation and characterization of Al and Mn doped ZnO (ZnO : (Al, Mn)) transparent conducting oxide films".Journal of Solid State Chemistry 177.4-5(2004):1480-1487.