A simulator for producing of high flux atomic oxygen beam by using ECR plasma source

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	A simulator for producing of high flux atomic oxygen beam by using ECR plasma source
	S. W. Duo; M. S. Li; Y. M. Zhang
	2004
发表期刊	Journal of Materials Science & Technology
ISSN	1005-0302
卷号	20 期号:6 页码:759-762
摘要	In order to study the atomic oxygen corrosion of spacecraft materials in low earth orbit environment, an atomic oxygen simulator was established. In the simulator, a 2.45 GHz microwave source with maximum power of 600 W was launched into the circular cavity to generate ECR (electron cyclotron resonance) plasma. The oxygen ion beam moved onto a negatively biased Mo plate under the condition of symmetry magnetic mirror field confine, then was neutralized and reflected to form oxygen atom beam. The properties of plasma density, electron temperature, plasma space potential and ion incident energy were characterized. The atomic oxygen beam flux was calibrated by measuring the mass loss rate of Kapton during the atomic oxygen exposure. The test results show that the atomic oxygen beam with flux Of 10(16)similar to10(17) atoms(.)cm(-2.)s(-1) and energy of 5similar to30 eV and a cross section of phi80 mm could be obtained under the operating pressure of 10(-1)similar to10(-3) Pa. Such a high flux source can provide accelerated simulation tests of materials and coatings for space applications.
部门归属	chinese acad sci, met res inst, shenyang natl lab mat sci, shenyang 110016, peoples r china.;li, ms (reprint author), chinese acad sci, met res inst, shenyang natl lab mat sci, shenyang 110016, peoples r china;mshli@imr.ac.cn
关键词	Atomic Oxygen Low Earth Orbit Space Environment Ecr Plasma Microwave Surfaces Erosion
URL	查看原文
WOS记录号	WOS:000225623300033
引用统计	被引频次：22[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/35354
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	S. W. Duo,M. S. Li,Y. M. Zhang. A simulator for producing of high flux atomic oxygen beam by using ECR plasma source[J]. Journal of Materials Science & Technology,2004,20(6):759-762.
APA	S. W. Duo,M. S. Li,&Y. M. Zhang.(2004).A simulator for producing of high flux atomic oxygen beam by using ECR plasma source.Journal of Materials Science & Technology,20(6),759-762.
MLA	S. W. Duo,et al."A simulator for producing of high flux atomic oxygen beam by using ECR plasma source".Journal of Materials Science & Technology 20.6(2004):759-762.