Microstructures and mechanical properties of chromium oxide films by arc ion plating

IMR OpenIR

	Microstructures and mechanical properties of chromium oxide films by arc ion plating
	A. L. Ji; W. Wang; G. H. Song; Q. M. Wang; C. Sun; L. S. Wen
	2004
发表期刊	Materials Letters
ISSN	0167-577X
卷号	58 期号:14 页码:1993-1998
摘要	Chromium oxide (Cr2O3) films were deposited on stainless steel substrate by arc ion plating (AIP) technique. The results show that the flow rate of oxygen and bias voltage affected the microstructure, surface morphology and chemical composition of Cr2O3 films. The hardness of stoichiometric Cr2O3 film obtained at flow oxygen rate of 130 sccm and a bias voltage of -200 V reaches a maximum value of 36 GPa, much higher than that of films obtained by other deposition methods. (C) 2004 Elsevier B.V. All rights reserved.
部门归属	chinese acad sci, inst med res, dept surface engn mat, shenyang 110016, peoples r china. chinese acad sci, inst med res, shenyang natl lab mat sci, shenyang 110016, peoples r china. shenyang univ technol, shenyang 110023, peoples r china.;sun, c (reprint author), chinese acad sci, inst med res, dept surface engn mat, 72 wenhua rd, shenyang 110016, peoples r china;csun@imr.ac.cn
关键词	Cr2o3 Films Arc Ion Plating Microstructure Mechanical Properties Chemical-vapor-deposition Optical-properties Tin Films Coatings
URL	查看原文
WOS记录号	WOS:000220947500004
引用统计	被引频次：45[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/35385
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	A. L. Ji,W. Wang,G. H. Song,et al. Microstructures and mechanical properties of chromium oxide films by arc ion plating[J]. Materials Letters,2004,58(14):1993-1998.
APA	A. L. Ji,W. Wang,G. H. Song,Q. M. Wang,C. Sun,&L. S. Wen.(2004).Microstructures and mechanical properties of chromium oxide films by arc ion plating.Materials Letters,58(14),1993-1998.
MLA	A. L. Ji,et al."Microstructures and mechanical properties of chromium oxide films by arc ion plating".Materials Letters 58.14(2004):1993-1998.