A study of AlN films prepared by arc ion plating

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	A study of AlN films prepared by arc ion plating
	M. D. Huang; C. Y. Lu; B. Wang; C. Sun; R. F. Huang; L. S. Wen; G. Q. Lin; C. Dong
	2003
发表期刊	Journal of Materials Science & Technology
ISSN	1005-0302
卷号	19 期号:1 页码:27-29
摘要	Hexagonal AIN films have been obtained by arc ion plating at different negative biases. X-ray diffraction and scanning electron microscopy results show that AIN films with smooth surfaces and (002) preferred orientation are obtained at low biases, whereas those with coarse surfaces and (100) preferred orientation are obtained at high biases. The formation mechanism of AIN is analyzed and the experiment results are discussed. The effect of bias on adhesion strength has also been examined.
部门归属	chinese acad sci, inst met res, shenyang 110016, peoples r china. dalian univ technol, state key lab mat modificat laser ion & electron, dalian 116024, peoples r china.;wen, ls (reprint author), chinese acad sci, inst met res, shenyang 110016, peoples r china
关键词	Aln Aip Preferential Orientation Bias Thin-films Deposition
URL	查看原文
WOS记录号	WOS:000180691100008
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/35859
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	M. D. Huang,C. Y. Lu,B. Wang,et al. A study of AlN films prepared by arc ion plating[J]. Journal of Materials Science & Technology,2003,19(1):27-29.
APA	M. D. Huang.,C. Y. Lu.,B. Wang.,C. Sun.,R. F. Huang.,...&C. Dong.(2003).A study of AlN films prepared by arc ion plating.Journal of Materials Science & Technology,19(1),27-29.
MLA	M. D. Huang,et al."A study of AlN films prepared by arc ion plating".Journal of Materials Science & Technology 19.1(2003):27-29.