Mechanical properties of silicon carbonitride thin films

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	Mechanical properties of silicon carbonitride thin films
	X. F. Peng; X. F. Hu; W. Wang; L. X. Song
	2003
发表期刊	Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers
ISSN	0021-4922
卷号	42 期号:2A 页码:620-622
摘要	Silicon carbonitride thin films,were synthesized by reactive rf sputtering a silicon carbide target in nitrogen and argon atmosphere, or sputtering a silicon nitride target in methane and argon atmosphere, respectively. The Nanoindentation technique (Nanoindenter XP system with a continuous stiffness measurement technique) was employed to measure the hardness and elastic modulus of thin films. The effects of sputtering power on the mechanical properties are different for the two SiCN thin films. With increasing sputtering power, the hardness and the elastic modulus decrease for, the former but increase for the latter. The tendency is similar to the evolution trend of Si-C bonds in SiCN materials. This reflects that Si-C bonds provide greater hardness for SiCN thin films than Si-N and C-N bonds.
部门归属	chinese acad sci, shanghai inst ceram, r&d ctr special inorgan mat, shanghai 200050, peoples r china. chinese acad sci, shenyang natl lab mat sci, met res inst, shenyang 110016, peoples r china.;peng, xf (reprint author), chinese acad sci, shanghai inst ceram, r&d ctr special inorgan mat, shanghai 200050, peoples r china;xiaofengpengsh@hotmail.com
关键词	Silicon Carbonitride Hardness Bond Impact Chemical-vapor-deposition Nitride Coatings Carbide Growth
URL	查看原文
WOS记录号	WOS:000181805200055
引用统计	被引频次：15[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/35998
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	X. F. Peng,X. F. Hu,W. Wang,et al. Mechanical properties of silicon carbonitride thin films[J]. Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers,2003,42(2A):620-622.
APA	X. F. Peng,X. F. Hu,W. Wang,&L. X. Song.(2003).Mechanical properties of silicon carbonitride thin films.Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers,42(2A),620-622.
MLA	X. F. Peng,et al."Mechanical properties of silicon carbonitride thin films".Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers 42.2A(2003):620-622.