| Microstructural study on multilayer FeTaN/TaN (5) films |
| Q. Zhan; R. Yu; L. L. He; D. X. Li; H. B. Nie; C. Ong
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| 2003
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| 发表期刊 | Materials Letters
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| ISSN | 0167-577X
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| 卷号 | 57期号:24-25页码:3904-3909 |
| 摘要 | The microstructure of [FeTaN/TaN](5) multilayer films has been investigated by transmission electron microscopy (TEM) and high-resolution electron microscopy (HREM) in cross section and plan view. Each layer shows a small surface roughening less than 1 nm. The FeTaN layers are composed of b.c.c. Fe with Ta incorporated substitutionally and N interstitially, denoted as Fe(Ta,N); while the TaN layers mainly consist of f.c.c. TaN phase. A [110] texture of Fe(Ta,N) has been formed in the FeTaN layers. The columnar grain structure is a typical feature in FeTaN layers. (C) 2003 Elsevier Science B.V. All rights reserved. |
| 部门归属 | chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china. natl univ singapore, dept phys, singapore 119260, singapore. natl univ singapore, ctr superconducting & magnet mat, singapore 119260, singapore.;zhan, q (reprint author), chinese acad sci, inst met res, shenyang natl lab mat sci, 72 wenhua rd, shenyang 110016, peoples r china
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| 关键词 | Microstructure
Thin Films
Magnetic Materials
Transmission Electron
Microscopy (Tem)
Sputtering
Fetan Thin-films
Magnetic-properties
Recording-heads
Tantalum
Nitride
Temperature
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| URL | 查看原文
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| 文献类型 | 期刊论文
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| 条目标识符 | http://ir.imr.ac.cn/handle/321006/36145
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| 专题 | 中国科学院金属研究所
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推荐引用方式
GB/T 7714 |
Q. Zhan,R. Yu,L. L. He,et al. Microstructural study on multilayer FeTaN/TaN (5) films[J]. Materials Letters,2003,57(24-25):3904-3909.
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| APA |
Q. Zhan,R. Yu,L. L. He,D. X. Li,H. B. Nie,&C. Ong.(2003).Microstructural study on multilayer FeTaN/TaN (5) films.Materials Letters,57(24-25),3904-3909.
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| MLA |
Q. Zhan,et al."Microstructural study on multilayer FeTaN/TaN (5) films".Materials Letters 57.24-25(2003):3904-3909.
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