Piezoelectric coefficient measurement of piezoelectric thin films: an overview

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	Piezoelectric coefficient measurement of piezoelectric thin films: an overview
	J. M. Liu; B. Pan; H. L. W. Chan; S. N. Zhu; Y. Y. Zhu; Z. G. Liu
	2002
发表期刊	Materials Chemistry and Physics
ISSN	0254-0584
卷号	75 期号:1-3 页码:41261
摘要	An overview on the state-of-art piezoelectric measurements of thin films is given. The principles and advantages/disadvantages of the conventional techniques are discussed for piezoelectric applications. Concerning a direct measurement of piezoelectric coefficient and taking into account of 1.0-100.0 mum in film thickness, a displacement of 0.1 nm cannot be reliably detected by utilizing the reverse piezoelectric effect, unless the probe's resolution reaches up to 10(-3) nm. The sensitivity of charge-integrator cannot be worse than similar to0.1 nC, typically. Such a high resolution in terms of displacement and charge may not be always reachable if the measurement is not carefully calibrated and manipulated. New demands on the techniques have been placed and a more careful selection of the techniques to be used is required. (C) 2002 Elsevier Science B.V. All rights reserved.
部门归属	nanjing univ, solid state microstruct lab, nanjing 210093, peoples r china. hong kong polytech univ, dept appl phys, kowloon, hong kong, peoples r china. chinese acad sci, int ctr mat sci, shenyang 110016, peoples r china.;liu, jm (reprint author), nanjing univ, solid state microstruct lab, nanjing 210093, peoples r china
关键词	Piezoelectric Coefficient Piezoelectric Thin Films Interferometer
URL	查看原文
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/36347
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	J. M. Liu,B. Pan,H. L. W. Chan,et al. Piezoelectric coefficient measurement of piezoelectric thin films: an overview[J]. Materials Chemistry and Physics,2002,75(1-3):41261.
APA	J. M. Liu,B. Pan,H. L. W. Chan,S. N. Zhu,Y. Y. Zhu,&Z. G. Liu.(2002).Piezoelectric coefficient measurement of piezoelectric thin films: an overview.Materials Chemistry and Physics,75(1-3),41261.
MLA	J. M. Liu,et al."Piezoelectric coefficient measurement of piezoelectric thin films: an overview".Materials Chemistry and Physics 75.1-3(2002):41261.