Properties of TiO2 thin films prepared by magnetron sputtering

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	Properties of TiO2 thin films prepared by magnetron sputtering
	W. J. Zhang; Y. Li; F. H. Wang
	2002
发表期刊	Journal of Materials Science & Technology
ISSN	1005-0302
卷号	18 期号:2 页码:101-107
摘要	With rapid progressive application of TiO2 thin films, magnetron sputtering becomes a very interesting method to prepare such multi-functional thin films. This paper focuses on influences of various deposition processes and deposition rate on the structures and properties of TiO2 thin films. Anatase, rutile or amorphous TiO2 films with various crystalline structures and different photocatalytic, optical and electrical properties can be produced by varying sputtering gases, substrate temperature, annealing process, deposition rate and the characteristics of magnetron sputtering. This may in turn affect the functions of TiO2 films in many applications. Furthermore, TiO2-based composites films can overcome many limitations and improve the properties of TiO2 films.
部门归属	chinese acad sci, met res inst, state key lab corros & protect, shenyang 110016, peoples r china.;wang, fh (reprint author), chinese acad sci, met res inst, state key lab corros & protect, shenyang 110016, peoples r china
关键词	Tio2 Thin Film Magnetron Sputtering Deposition Process Composite Film Optical-properties Heterogeneous Photocatalysis Substrate-temperature Cosputtering Method Titanium-dioxide Deposition Oxidation Frequency Water Ion
URL	查看原文
WOS记录号	WOS:000174881400003
引用统计	被引频次：45[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/36551
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	W. J. Zhang,Y. Li,F. H. Wang. Properties of TiO2 thin films prepared by magnetron sputtering[J]. Journal of Materials Science & Technology,2002,18(2):101-107.
APA	W. J. Zhang,Y. Li,&F. H. Wang.(2002).Properties of TiO2 thin films prepared by magnetron sputtering.Journal of Materials Science & Technology,18(2),101-107.
MLA	W. J. Zhang,et al."Properties of TiO2 thin films prepared by magnetron sputtering".Journal of Materials Science & Technology 18.2(2002):101-107.