ZAO: an attractive potential substitute for ITO in flat display panels

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	ZAO: an attractive potential substitute for ITO in flat display panels
	M. Chen; Z. L. Pei; C. Sun; J. Gong; R. F. Huang; L. S. Wen
	2001
发表期刊	Materials Science and Engineering B-Solid State Materials for Advanced Technology
ISSN	0921-5107
卷号	85 期号:2-3 页码:212-217
摘要	Al-doped ZnO (ZAO) is an attractive material, as it is cheap and abundant, it is nontoxic, has comparable electrical, optical and infrared (I-R) properties to ITO, is cost-effective and is easy to fabricate. In this paper, ZAO films have been prepared by reactive magnetron sputtering. Their electrical conductivity is shown to be in the region of 10(-4) Omega cm. The influence of the substrate-to-target distance and deposition temperature on the resistivity of ZAO films has been studied. Their IR and optical properties have been investigated with UV-VIS and Fourier transformation IR spectrometry. It was shown that the visible transmittance and IR reflectance of ZAO films deposited on polyester at room temperature are comparable to those of ITO films. ZAO films have n-type conductivity. It was found that by adding Al to ZnO the variation in resistivity of ZAO films was decreased, and was usually no more than 1% at 50-400 degreesC in vacuum and 5% at 50-400 degreesC in air. (C) 2001 Elsevier Science B.V. All rights reserved.
部门归属	acad sinica, inst met res, shenyang 110015, peoples r china.;wen, ls (reprint author), acad sinica, inst met res, shenyang 110015, peoples r china
关键词	Transparent Conducting Films Zao Reactive Magnetron Sputtering Tin Oxide-films Sn-doped In2o3 Optical-properties Electrical-properties Indium Oxide Evaporated Indium Thin-films Zno Films Al Rf
URL	查看原文
WOS记录号	WOS:000170247700029
引用统计	被引频次：144[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/36605
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	M. Chen,Z. L. Pei,C. Sun,et al. ZAO: an attractive potential substitute for ITO in flat display panels[J]. Materials Science and Engineering B-Solid State Materials for Advanced Technology,2001,85(2-3):212-217.
APA	M. Chen,Z. L. Pei,C. Sun,J. Gong,R. F. Huang,&L. S. Wen.(2001).ZAO: an attractive potential substitute for ITO in flat display panels.Materials Science and Engineering B-Solid State Materials for Advanced Technology,85(2-3),212-217.
MLA	M. Chen,et al."ZAO: an attractive potential substitute for ITO in flat display panels".Materials Science and Engineering B-Solid State Materials for Advanced Technology 85.2-3(2001):212-217.