Dependence of structural, electrical, and optical properties of ZnO : Al films on substrate temperature

IMR OpenIR

	Dependence of structural, electrical, and optical properties of ZnO : Al films on substrate temperature
	M. Chen; Z. L. Pei; X. Wang; C. Sun; L. S. Wen
	2001
发表期刊	Journal of Materials Research
ISSN	0884-2914
卷号	16 期号:7 页码:2118-2123
摘要	ZnO:Al (ZAO) films were deposited on fused silica substrates heated to 350 degreesC by de magnetron reactive sputtering from a Zn target mixed with 1.5 wt% Al. Films deposited on a substrate heated to a temperature between room temperature and 300 degreesC were (001)-oriented crystals, but those grown at 350 degreesC consisted of crystallites with (001) and (101) orientations. The dependence of electrical properties such as resistivity, carrier concentration, and Hall mobility on temperature was measured. The results indicate that the carrier concentration and Hall mobility increase with increasing temperature up to 250 degreesC, though the Al content remains unchanged in this temperature range. The probable mechanisms are discussed. The minimum resistivity of ZAO films is 4.23 x 10(-4) R cm, with a carrier concentration of 9.21 x 10(20) cm(-3) and a Hall mobility of 16.0 cm(2) v(-1) s(-1). The films show a visible transmittance of above 80%.
部门归属	chinese acad sci, shanghai inst met, ion beam lab, shanghai 200050, peoples r china. chinese acad sci, inst met res, shenyang 110015, peoples r china.;chen, m (reprint author), chinese acad sci, shanghai inst met, ion beam lab, shanghai 200050, peoples r china
关键词	Thin-films Oxide-films Parameters Rf
URL	查看原文
WOS记录号	WOS:000169668200034
引用统计	被引频次：18[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/36607
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	M. Chen,Z. L. Pei,X. Wang,et al. Dependence of structural, electrical, and optical properties of ZnO : Al films on substrate temperature[J]. Journal of Materials Research,2001,16(7):2118-2123.
APA	M. Chen,Z. L. Pei,X. Wang,C. Sun,&L. S. Wen.(2001).Dependence of structural, electrical, and optical properties of ZnO : Al films on substrate temperature.Journal of Materials Research,16(7),2118-2123.
MLA	M. Chen,et al."Dependence of structural, electrical, and optical properties of ZnO : Al films on substrate temperature".Journal of Materials Research 16.7(2001):2118-2123.