Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering

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	Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering
	M. Chen; Z. L. Pei; X. Wang; C. Sun; L. S. Wen
	2001
发表期刊	Materials Letters
ISSN	0167-577X
卷号	48 期号:3-4 页码:137-143
摘要	High preferred (002) orientation Al-doped ZnO (ZAO) films have been prepared by de magnetron reactive sputtering of an alloy target (98.5 wt.% Zn-1.5 wt.% Al) onto polyester substrates. The structural, mechanical, electrical and optical properties were investigated. The ZAO film has a sheet resistance of as low as 47.5 Omega/square and an average visible transmittance of about 70%. An average IR reflectance of about 70% in the region of 2.5-25 mum also has been obtained. (C) 2001 Elsevier Science B.V. All rights reserved.
部门归属	chinese acad sci, shanghai inst met, ion beam lab, shanghai 200050, peoples r china. chinese acad sci, inst met res, shenyang 110015, peoples r china.;chen, m (reprint author), chinese acad sci, shanghai inst met, ion beam lab, shanghai 200050, peoples r china
关键词	Al-doped Zno (Zao) Polyester Mechanical Ir Reflectance Thin-films Optical-properties Oxide-films Electrical-properties Rf Temperature Orientation Parameters Deposition Substrate
URL	查看原文
WOS记录号	WOS:000168025100003
引用统计	被引频次：24[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/36608
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	M. Chen,Z. L. Pei,X. Wang,et al. Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering[J]. Materials Letters,2001,48(3-4):137-143.
APA	M. Chen,Z. L. Pei,X. Wang,C. Sun,&L. S. Wen.(2001).Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering.Materials Letters,48(3-4),137-143.
MLA	M. Chen,et al."Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering".Materials Letters 48.3-4(2001):137-143.