Optical and electrical properties of direct-current magnetron sputtered ZnO : Al films

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	Optical and electrical properties of direct-current magnetron sputtered ZnO : Al films
	Z. L. Pei; C. Sun; M. H. Tan; J. Q. Xiao; D. H. Guan; R. F. Huang; L. S. Wen
	2001
发表期刊	Journal of Applied Physics
ISSN	0021-8979
卷号	90 期号:7 页码:3432-3436
摘要	In this study, high-quality ZnO:Al (ZAO) films were prepared by using dc reaction magnetron sputtering technology. The effect of Al doped in ZnO films on electrical and optical properties and its scattering mechanism were discussed in detail. The results showed that Al2O3 could be effectively removed by controlling oxygen flow and Al-doped concentration during deposition of ZnO:Al films. Zn, Al, and oxygen elements were well distributed through the films. For highly degenerated ZnO:Al semiconductor thin films, it was revealed that ionized impurity scattering dominated the Hall mobility of the films in the low-temperature range; while the lattice vibration became a major scattering mechanism in the high-temperature range. The grain-boundary scattering only played a major role in the ZAO films with small grain size (as compared to the electron mean-free path). The photoelectric properties of ZAO films showed that the lower resistivity (similar to 5x10(-4) Omega cm) was obtained, and transmittance in the visible range and reflectance in the IR region were above 80% and 60%, respectively. (C) 2001 American Institute of Physics.
部门归属	chinese acad sci, inst met res, shenyang 110016, peoples r china.;sun, c (reprint author), chinese acad sci, inst met res, shenyang 110016, peoples r china
关键词	Transparent Conducting Films Oxide Thin-films Mechanism Sensors
URL	查看原文
WOS记录号	WOS:000171135900048
引用统计	被引频次：185[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/36776
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Z. L. Pei,C. Sun,M. H. Tan,et al. Optical and electrical properties of direct-current magnetron sputtered ZnO : Al films[J]. Journal of Applied Physics,2001,90(7):3432-3436.
APA	Z. L. Pei.,C. Sun.,M. H. Tan.,J. Q. Xiao.,D. H. Guan.,...&L. S. Wen.(2001).Optical and electrical properties of direct-current magnetron sputtered ZnO : Al films.Journal of Applied Physics,90(7),3432-3436.
MLA	Z. L. Pei,et al."Optical and electrical properties of direct-current magnetron sputtered ZnO : Al films".Journal of Applied Physics 90.7(2001):3432-3436.