Surface characterization of transparent conductive oxide Al-doped ZnO films

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	Surface characterization of transparent conductive oxide Al-doped ZnO films
	M. Chen; Z. L. Pei; C. Sun; L. S. Wen; X. Wang
	2000
发表期刊	Journal of Crystal Growth
ISSN	0022-0248
卷号	220 期号:3 页码:254-262
摘要	High preferred (002) orientation Al-doped ZnO (ZAO) films were prepared by DC magnetron reactive sputtering from a Zn target mixed with Al of 2.0wt%. The dependence of spatial distributions of resistivity on substrate temperature indicates that the spatial distribution of resistivity across substrate placed parallel to the target was improved by increasing substrate temperature. XPS analysis indicates Al-enrichment on the film surface. (C) 2000 Elsevier Science B.V. All rights reserved.
部门归属	chinese acad sci, shanghai inst met, ion beam lab, shanghai 200050, peoples r china. acad sinica, inst met res, shenyang 110015, peoples r china.;chen, m (reprint author), chinese acad sci, shanghai inst met, ion beam lab, shanghai 200050, peoples r china
关键词	Al-doped Zno (Zao) Spatial Distribution Xps Al-enrichment Thin-films Optical-properties Electrical-properties Rf Dc Deposition
URL	查看原文
WOS记录号	WOS:000165699500012
引用统计	被引频次：242[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/36993
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	M. Chen,Z. L. Pei,C. Sun,et al. Surface characterization of transparent conductive oxide Al-doped ZnO films[J]. Journal of Crystal Growth,2000,220(3):254-262.
APA	M. Chen,Z. L. Pei,C. Sun,L. S. Wen,&X. Wang.(2000).Surface characterization of transparent conductive oxide Al-doped ZnO films.Journal of Crystal Growth,220(3),254-262.
MLA	M. Chen,et al."Surface characterization of transparent conductive oxide Al-doped ZnO films".Journal of Crystal Growth 220.3(2000):254-262.