Intrinsic limit of electrical properties of transparent conductive oxide films

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	Intrinsic limit of electrical properties of transparent conductive oxide films
	M. Chen; Z. L. Pei; X. Wang; Y. H. Yu; X. H. Liu; C. Sun; L. S. Wen
	2000
发表期刊	Journal of Physics D-Applied Physics
ISSN	0022-3727
卷号	33 期号:20 页码:2538-2548
摘要	Contributions of acoustical deformation scattering, ion impurity scattering and grain boundary potential scattering to the conductivity of TCO films have been calculated in order to deduce the intrinsic limit of conductivity of TCO films regardless of precise details of the preparation procedure. The results indicate that the effective mass of charge carriers has a strong dependence on carrier concentration. Based on the effective mass correction, as well as the carrier concentration ionized impurity centre correction, scattering due to ion impurity has been developed to explain the upper limit of mobility or the lower limit of resistivity of TCO films. Two empirical expressions are introduced to depict the dependence of the upper limit of mobility and the lower limit of resistivity of TCO films on carrier concentration. The dependence of transparency on carrier concentration is also discussed.
部门归属	chinese acad sci, shanghai inst met, ion beam lab, shanghai 200050, peoples r china. chinese acad sci, inst met res, shenyang 110015, peoples r china.;chen, m (reprint author), chinese acad sci, shanghai inst met, ion beam lab, shanghai 200050, peoples r china
关键词	Doped In2o3 Films Dominant Scattering Mechanisms Amorphous Indium Oxide Optical-properties Thin-films Zno Films Structural-properties Reactive Evaporation Physical-properties Spray-pyrolysis
URL	查看原文
WOS记录号	WOS:000165099900007
引用统计	被引频次：98[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/36994
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	M. Chen,Z. L. Pei,X. Wang,et al. Intrinsic limit of electrical properties of transparent conductive oxide films[J]. Journal of Physics D-Applied Physics,2000,33(20):2538-2548.
APA	M. Chen.,Z. L. Pei.,X. Wang.,Y. H. Yu.,X. H. Liu.,...&L. S. Wen.(2000).Intrinsic limit of electrical properties of transparent conductive oxide films.Journal of Physics D-Applied Physics,33(20),2538-2548.
MLA	M. Chen,et al."Intrinsic limit of electrical properties of transparent conductive oxide films".Journal of Physics D-Applied Physics 33.20(2000):2538-2548.