X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films

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	X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films
	M. Chen; X. Wang; Y. H. Yu; Z. L. Pei; X. D. Bai; C. Sun; R. F. Huang; L. S. Wen
	2000
发表期刊	Applied Surface Science
ISSN	0169-4332
卷号	158 期号:1-2 页码:134-140
摘要	The chemical state of oxygen, aluminum and zinc in Al-doped ZnO (ZAO) films was investigated by X-ray photoelectron spectroscopy (XPS), as well as the transition zone of the film-to-substrate, by auger electron spectroscopy (AES). The results show that zinc remains mostly in the formal valence states of Zn2+. A distinct asymmetry in Al 2p(3/2) photoelectron peaks has been resolved into two components, one is metallic Al and the other is oxidized Al. The depth profile of the two components revealed that metallic Al mainly exists in the thin surface layer. The close inspection of Ols shows that Ols is composed of three components, centered at 530.15 +/- 0.15, 531.25 +/- 0.20 and 532.40 +/- 0.15 eV, respectively. AES reveals an abrupt transition zone between the ZAO and quartz substrate. (C) 2000 Elsevier Science B.V. All rights reserved.
部门归属	chinese acad sci, shanghai inst met, ion beam lab, shanghai 200050, peoples r china. chinese acad sci, inst met res, shenyang 110015, peoples r china.;chen, m (reprint author), chinese acad sci, shanghai inst met, ion beam lab, shanghai 200050, peoples r china
关键词	Al-doped Zno (Zao) Xps Al Oxygen Transition Zone Oxide Thin-films Transparent Growth Rf
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WOS记录号	WOS:000087605300019
引用统计	被引频次：1256[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/36995
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	M. Chen,X. Wang,Y. H. Yu,et al. X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films[J]. Applied Surface Science,2000,158(1-2):134-140.
APA	M. Chen.,X. Wang.,Y. H. Yu.,Z. L. Pei.,X. D. Bai.,...&L. S. Wen.(2000).X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films.Applied Surface Science,158(1-2),134-140.
MLA	M. Chen,et al."X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films".Applied Surface Science 158.1-2(2000):134-140.