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The role of cascade atoms in the zero-influence and the low-bombarding-energy isotope sputtering
L. P. Zheng
2000
发表期刊Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
ISSN0168-583X
卷号160期号:1页码:29-32
摘要Influence of cascade atoms on the preferential emission of isotopes during sputtering has been studied by a static Monte Carlo simulation program, for Zero-fluence and low-energy (below 1 keV) Xe ion bombardment of a Cu-63(0.5) Cu-65(0.5) target. Calculations show that the probabilities of the sputtered cascade atoms of Cu-63 and Cu-65 are over 80%. The calculations also show that towards the surface, the momentum flux of the cascade atoms of Cu-65 is much more than that of Cu-65. The momentum asymmetry in the collision cascade prays a dominating role in preferential emission of the lighter Cu-63 atoms in the near-normal direction during low-bombarding-energy Cu-63-Cu-65 sputtering. (C) 2000 Elsevier Science B.V. All rights reserved.
部门归属acad sinica, shanghai inst nucl res, shanghai 201800, peoples r china. acad sinica, inst met res, atom imaging solids lab, shenyang 110015, peoples r china. acad sinica, int ctr mat phys, shenyang 110015, peoples r china.;zheng, lp (reprint author), acad sinica, shanghai inst nucl res, pob 800-204, shanghai 201800, peoples r china
关键词Isotope Sputtering Momentum Asymmetry Cascade Atoms Monte-carlo Simulation Angular-distribution Fractionation Mo-92-mo-100 Molybdenum Targets
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WOS记录号WOS:000084394800006
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被引频次:7[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/37277
专题中国科学院金属研究所
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L. P. Zheng. The role of cascade atoms in the zero-influence and the low-bombarding-energy isotope sputtering[J]. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,2000,160(1):29-32.
APA L. P. Zheng.(2000).The role of cascade atoms in the zero-influence and the low-bombarding-energy isotope sputtering.Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,160(1),29-32.
MLA L. P. Zheng."The role of cascade atoms in the zero-influence and the low-bombarding-energy isotope sputtering".Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms 160.1(2000):29-32.
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