The deposition of oriented diamond film by hot-filament chemical vapor deposition with separate reactant gas

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	The deposition of oriented diamond film by hot-filament chemical vapor deposition with separate reactant gas
	G. C. Chen; C. Sun; R. F. Huang; L. S. Wen; D. Y. Jiang; X. Z. Yao
	1999
发表期刊	Journal of Materials Research
ISSN	0884-2914
卷号	14 期号:8 页码:3196-3199
摘要	A (110)-oriented diamond film was deposited by hot filament chemical vapor deposition with H-2 and CH4 separately introduced into the reactive zone. The film with a degree of orientation I-(220)/I-(111) of more than 200% and deposition rate of 2-3 mu m/h was obtained for a deposition time of 17 h. The long deposition time enlarged the grain size and enhanced the degree of orientation, but too long a deposition time resulted in random growth. The temperature field was measured and also calculated using a simple model. Both results showed that a temperature field existed with varied gradients along the normal of substrate surface. The (110)-oriented diamond film was deposited in the zone with negative temperature gradient. The change in orientation occurring for long deposition times was ascribed to the change of temperature gradient.
部门归属	acad sinica, inst met res, shenyang 110015, peoples r china. acad sinica, inst phys, beijing 100080, peoples r china.;chen, gc (reprint author), inst phys, grp 106, beijing, peoples r china
关键词	Growth Morphology Mechanism Surfaces Si(100) Plasma C-13 Cvd
URL	查看原文
WOS记录号	WOS:000082550800005
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/37316
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	G. C. Chen,C. Sun,R. F. Huang,et al. The deposition of oriented diamond film by hot-filament chemical vapor deposition with separate reactant gas[J]. Journal of Materials Research,1999,14(8):3196-3199.
APA	G. C. Chen,C. Sun,R. F. Huang,L. S. Wen,D. Y. Jiang,&X. Z. Yao.(1999).The deposition of oriented diamond film by hot-filament chemical vapor deposition with separate reactant gas.Journal of Materials Research,14(8),3196-3199.
MLA	G. C. Chen,et al."The deposition of oriented diamond film by hot-filament chemical vapor deposition with separate reactant gas".Journal of Materials Research 14.8(1999):3196-3199.