SnO2 gas sensor films deposited by pulsed laser ablation

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	SnO2 gas sensor films deposited by pulsed laser ablation
	Y. Zhao; Z. C. Feng; Y. Liang
	1999
发表期刊	Sensors and Actuators B-Chemical
ISSN	0925-4005
卷号	56 期号:3 页码:224-227
摘要	Pulsed laser ablation deposition (PLAD) was used to produce SnO2 thin films, which had high sensitivity to 60 ppm ethanol in air with short response and recovery times. The maximum sensitivity was achieved at 300 degrees C. According to an equation for conductance proposed by Morrison, values of the Schottky barriers, eV(s) between the adjacent grains were calculated from measured resistance values as a function of temperature. At temperature below 423 K and above 648 K, nearly constant eV(s) values were obtained, but between the two temperatures, eV(s) increased linearly with temperature. The dependence of film resistance, R, on ethanol concentration in air, p, satisfied a power law equation, R-(p) = R-(p=0) p(-beta), with the values of exponent beta were both 0.35 at 250 degrees C and 300 degrees C. (C) 1999 Elsevier Science S.A. All rights reserved.
部门归属	chinese acad sci, inst met res, shenyang 110015, liaoning, peoples r china.;zhao, y (reprint author), chinese acad sci, inst met res, shenyang 110015, liaoning, peoples r china
关键词	Pulsed Laser Deposition Sno2 Gas Sensor Thin-films
URL	查看原文
WOS记录号	WOS:000081203900006
引用统计	被引频次：30[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/37590
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Y. Zhao,Z. C. Feng,Y. Liang. SnO2 gas sensor films deposited by pulsed laser ablation[J]. Sensors and Actuators B-Chemical,1999,56(3):224-227.
APA	Y. Zhao,Z. C. Feng,&Y. Liang.(1999).SnO2 gas sensor films deposited by pulsed laser ablation.Sensors and Actuators B-Chemical,56(3),224-227.
MLA	Y. Zhao,et al."SnO2 gas sensor films deposited by pulsed laser ablation".Sensors and Actuators B-Chemical 56.3(1999):224-227.