| Monte Carlo simulation of angular distribution and fractionation in the zero-fluence isotope sputtering |
| L. P. Zheng
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| 1998
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| 发表期刊 | Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
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| ISSN | 0168-583X
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| 卷号 | 142期号:1-2页码:30-34 |
| 摘要 | A static Monte Carlo simulation program has been used to study the influence of primary and secondary knock-on atoms on the angular distribution and the fractionation, for zero-fluence sputtering of Mo-92-Mo-100. At 10 keV Xe ion energy, calculations show that significant depth-dependent momentum asymmetry exists in the near-surface region, as in Refs. (L.P. Zheng, R.S. Li, M.Y.LI, Nucl. Instr, and Meth. B 100 (1995) 490; L.P. Zheng, M.Y. Li, Nucl. Instr. and Meth. B 114(1996) 28). The calculations also show that at the polar emission angle range between 0 degrees and 90 degrees the probabilities of the sputtered primary knock-on atoms for Mo-92 and Mo-100 are small (6.1% for Mo-92 and 6.6% for Mo-100), especially, between 0 degrees and 30 degrees they are very small (2.5% for Mo-92 and 2.8% for Mo-100). At 0.1 keV Ar ion energy, the calculations show that partial momentum flux ratios, for the primary and the secondary knock-on atoms, deviate far from one, through marker plane 1 (about an atomic layer distance from the surface). (C) 1998 Elsevier Science B.V. All rights reserved. |
| 部门归属 | acad sinica, shanghai inst nucl res, shanghai 201800, peoples r china. acad sinica, inst met res, atom imaging solids lab, shenyang 110015, peoples r china. acad sinica, int ctr mat phys, shenyang 110015, peoples r china.;zheng, lp (reprint author), acad sinica, shanghai inst nucl res, pob 800-204, shanghai 201800, peoples r china
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| 关键词 | Mo-92-mo-100
Targets
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| URL | 查看原文
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| WOS记录号 | WOS:000074892500004
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| 引用统计 |
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| 文献类型 | 期刊论文
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| 条目标识符 | http://ir.imr.ac.cn/handle/321006/37901
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| 专题 | 中国科学院金属研究所
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推荐引用方式
GB/T 7714 |
L. P. Zheng. Monte Carlo simulation of angular distribution and fractionation in the zero-fluence isotope sputtering[J]. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,1998,142(1-2):30-34.
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| APA |
L. P. Zheng.(1998).Monte Carlo simulation of angular distribution and fractionation in the zero-fluence isotope sputtering.Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,142(1-2),30-34.
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| MLA |
L. P. Zheng."Monte Carlo simulation of angular distribution and fractionation in the zero-fluence isotope sputtering".Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms 142.1-2(1998):30-34.
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