Under 1 keV Ar ion bombardment of Cu-Pt alloys at high fluence and low temperature, the depletion degree of the segregating species at the second surface layer, and the normalized sputtering yield ratios (non-segregating species/segregating species) in the near-normal direction (15 degrees) and at oblique angle (75 degrees), have been estimated by an improved kinetic BIGS (bombardment-induced Gibbsian segregation) model. For the bombarded Cu-Pt alloys, calculations show that the depletion degree of the segregating species at the second surface layer is small when its bulk composition equals the extreme value, but this depletion degree becomes large when its bulk composition equals the intermediate value. Furthermore, the difference of the normalized sputtering yield ratio between 15 degrees and 75 degrees is small when the bulk composition of the segregating species equals the extreme value, but this difference becomes large when that of the segregating species equals the intermediate value.
部门归属
chinese acad sci, shanghai inst nucl res, shanghai 201800, peoples r china. chinese acad sci, inst met res, atom imaging solids lab, shenyang 110015, peoples r china.;zheng, lp (reprint author), chinese acad sci, shanghai inst nucl res, shanghai 201800, peoples r china
L. P. Zheng,R. S. Li. Surface-compositional and angular distributions during Cu-Pt sputtering[J]. Journal of Materials Science & Technology,1998,14(4):335-338.
APA
L. P. Zheng,&R. S. Li.(1998).Surface-compositional and angular distributions during Cu-Pt sputtering.Journal of Materials Science & Technology,14(4),335-338.
MLA
L. P. Zheng,et al."Surface-compositional and angular distributions during Cu-Pt sputtering".Journal of Materials Science & Technology 14.4(1998):335-338.
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