Calculation of sputtering yields under high-fluence bombardment of a CuxN1-x alloy

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	Calculation of sputtering yields under high-fluence bombardment of a CuxN1-x alloy
	L. P. Zheng; R. S. Li; M. Y. Li
	1998
发表期刊	Vacuum
ISSN	0042-207X
卷号	51 期号:3 页码:413-416
摘要	Under 2 keV Ar ion bombardment of a CuxNi1-x alloy, at high fluence and at low temperature, Cu and Ni sputtering yields, the total sputtering yield (Cu+Ni yields), and the sputtering yields from the first surface layer and from beneath this layer for Cu and Ni, have been separately calculated by an improved kinetic BIGS (bombardment-induced Gibbsian segregation) model. Calculations indicate that these sputtering yields are strongly dependant on the Cu (segregating species) bulk composition. A cause of the possible correlation between sputtering angular distribution and bulk composition of the segregating species is also analysed for the segregating system. (C) 1998 Elsevier Science Ltd. All rights reserved.
部门归属	acad sinica, shanghai inst nucl res, shanghai 201800, peoples r china. acad sinica, inst met res, atom imaging solids lab, shenyang 110015, peoples r china. acad sinica, int ctr mat phys, shenyang 110015, peoples r china.;zheng, lp (reprint author), acad sinica, shanghai inst nucl res, pob 800-204, shanghai 201800, peoples r china
关键词	Surface Segregation Eutectic Alloy Implantation Simulations
URL	查看原文
WOS记录号	WOS:000077209100016
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/37903
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	L. P. Zheng,R. S. Li,M. Y. Li. Calculation of sputtering yields under high-fluence bombardment of a CuxN1-x alloy[J]. Vacuum,1998,51(3):413-416.
APA	L. P. Zheng,R. S. Li,&M. Y. Li.(1998).Calculation of sputtering yields under high-fluence bombardment of a CuxN1-x alloy.Vacuum,51(3),413-416.
MLA	L. P. Zheng,et al."Calculation of sputtering yields under high-fluence bombardment of a CuxN1-x alloy".Vacuum 51.3(1998):413-416.