Some characteristics of a new planar glow-discharge source with and without magnetic field

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	Some characteristics of a new planar glow-discharge source with and without magnetic field
	M. Chen; J. S. Ren; H. B. Ma; G. S. Zhang
	1997
发表期刊	Spectrochimica Acta Part B-Atomic Spectroscopy
ISSN	0584-8547
卷号	52 期号:8 页码:1161-1166
摘要	A new type of planar cathode glow-discharge source with demountable magnet is evaluated for its analytical potential as a boosted atomic-emission source. In the source the whole cylindrical chamber is the anode and the sample (metal plate) only is the cathode. A quartz ring between the anode and cathode is used both as an insulator and to restrict the plasma discharge of the cathode surface. A Nd-Fe-B ring-magnet is placed inside the anode close to the sample. The voltage-current characteristics for nine types of pure metal cathode material were investigated at discharge voltages of 500-1200 V over an argon pressure range of 180-720 Pa in the presence and absence of the magnetic field. An empirical formula was developed relating discharge voltage, current, and pressure. For Al, Cu, Ni, and Zn, the dependence of the reduced sputtering rates (mg min(-1) mA(-1)) on discharge voltage and argon gas pressure were investigated with and without the magnetic field. Studies indicate that the application of the magnetic field changes the properties of plasma discharge, and enhances the reduced sputtering rate and optical emission intensity. (C) 1997 Elsevier Science B.V.
部门归属	acad sinica,inst met res,shenyang 110015,peoples r china.
关键词	Atomic-emission Spectrometry Discharge Parameters Glow Discharge Magnetic Enhancement
URL	查看原文
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/37943
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	M. Chen,J. S. Ren,H. B. Ma,et al. Some characteristics of a new planar glow-discharge source with and without magnetic field[J]. Spectrochimica Acta Part B-Atomic Spectroscopy,1997,52(8):1161-1166.
APA	M. Chen,J. S. Ren,H. B. Ma,&G. S. Zhang.(1997).Some characteristics of a new planar glow-discharge source with and without magnetic field.Spectrochimica Acta Part B-Atomic Spectroscopy,52(8),1161-1166.
MLA	M. Chen,et al."Some characteristics of a new planar glow-discharge source with and without magnetic field".Spectrochimica Acta Part B-Atomic Spectroscopy 52.8(1997):1161-1166.