Dependence of surface-compositional and angular distributions on the bulk composition in the sputtering of Cu-Pt and Cu-Ni alloys

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	Dependence of surface-compositional and angular distributions on the bulk composition in the sputtering of Cu-Pt and Cu-Ni alloys
	L. P. Zheng; R. S. Li
	1997
发表期刊	Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
ISSN	0168-583X
卷号	129 期号:1 页码:16-20
摘要	Under 1 keV Ar ion bombardment of Cu-Pt and Cu-Ni alloys at high fluence at low temperature, the depletion degree of the segregating species at the second surface layer, and the normalized sputtering yield ratios (non-segregating species/segregating species) in the near-normal direction (15 degrees) and at oblique angles (75 degrees), have been estimated by an improved kinetic BIGS (Bombardment-Induced Gibbsian Segregation) model. For both the bombarded Cu-Pt and the bombarded Cu-Wi alloys, calculations show that the depletion degree of the segregating species at the second surface layer is small when its bulk composition equals the extreme value, but this depletion degree becomes large when its bulk composition equals the intermediate value. Furthermore, the difference of the normalized sputtering yield ratio between 15 degrees and 75 degrees is small when the bulk composition of the segregating species equals the extreme value, but this difference becomes large when that of the segregating species equals the intermediate value.
部门归属	acad sinica,inst met res,atom imaging solids lab,shenyang 110015,peoples r china. acad sinica,int ctr mat phys,shenyang 110015,peoples r china.;zheng, lp (reprint author), acad sinica,shanghai inst nucl res,pob 800-204,shanghai 201800,peoples r china
关键词	Bombardment-induced Segregation Ar ion-bombArdment Gibbsian Segregation Enhanced Diffusion Eutectic Alloy Binary-alloys Temperature Elements Implantation Simulations
URL	查看原文
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/38226
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	L. P. Zheng,R. S. Li. Dependence of surface-compositional and angular distributions on the bulk composition in the sputtering of Cu-Pt and Cu-Ni alloys[J]. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,1997,129(1):16-20.
APA	L. P. Zheng,&R. S. Li.(1997).Dependence of surface-compositional and angular distributions on the bulk composition in the sputtering of Cu-Pt and Cu-Ni alloys.Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,129(1),16-20.
MLA	L. P. Zheng,et al."Dependence of surface-compositional and angular distributions on the bulk composition in the sputtering of Cu-Pt and Cu-Ni alloys".Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms 129.1(1997):16-20.