Preparation of ZrO2-SnO2 thin films by the sol-gel technique and their gas sensitivity

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	Preparation of ZrO2-SnO2 thin films by the sol-gel technique and their gas sensitivity
	G. J. Fang; Z. L. Liu; Z. C. Zhang; K. L. Yao
	1996
Source Publication	Physica Status Solidi a-Applied Research
ISSN	0031-8965
Volume	156 Issue:1 Pages:81-85
Abstract	Pure and ZrO2-doped SnO2 thin films were prepared on ordinary soda-lime glass sheets by the sol-gel technique, using non-alkoxide SnCl2 . 2 H2O as main precursor, Zr(OC3H7)(4) as dopant, methanol as solvent. The gas sensing properties of the thin films were investigated. The relationship between the gas sensitivity and the gas concentration and working temperature was also studied. The experimental results show that by the ZrO2 dopant, the gas sensitivity of SnO2 thin films was greatly enhanced and the sensing temperature zone of the SnO2 thin film was moved to the low temperature area. The ZrO2SnO2 thin film shows excellent and unique sensing properties to H2S, i.e., good sensitivity, high selectivity, and quick response and recovery behaviour at room temperature. The gas sensing mechanism of SnO2/ZrO2-SnO2 thin films to H2S gas is also discussed.
description.department	acad sinica,int ctr mat phys,shenyang 110015,peoples r china. ccast,world lab,beijing 100080,peoples r china. xiangyang teachers coll,dept phys,xiangtan 441053,hubei,peoples r china.;fang, gj (reprint author), huazhong univ sci & technol,dept phys,wuhan 430074,peoples r china
Keyword	H2s Sensors
URL	查看原文
Document Type	期刊论文
Identifier	http://ir.imr.ac.cn/handle/321006/38277
Collection	中国科学院金属研究所
Recommended Citation GB/T 7714	G. J. Fang,Z. L. Liu,Z. C. Zhang,et al. Preparation of ZrO2-SnO2 thin films by the sol-gel technique and their gas sensitivity[J]. Physica Status Solidi a-Applied Research,1996,156(1):81-85.
APA	G. J. Fang,Z. L. Liu,Z. C. Zhang,&K. L. Yao.(1996).Preparation of ZrO2-SnO2 thin films by the sol-gel technique and their gas sensitivity.Physica Status Solidi a-Applied Research,156(1),81-85.
MLA	G. J. Fang,et al."Preparation of ZrO2-SnO2 thin films by the sol-gel technique and their gas sensitivity".Physica Status Solidi a-Applied Research 156.1(1996):81-85.

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