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LASER SYNTHESIS OF ULTRAFINE SI3N4-SIC POWDERS FROM HEXAMETHYLDISILAZANE
Y. L. Li; Y. Liang; F. Zheng; Z. Q. Hu
1994
Source PublicationMaterials Science and Engineering a-Structural Materials Properties Microstructure and Processing
ISSN0921-5093
Volume174Issue:2Pages:L23-L26
AbstractUltrafine Si3Ni4-SiC powders have been successfully prepared from hexamethyldisilazane ((Me(3)Si)(2)NH) (Me drop- CH3) and NH3 by a laser-induced gas phase reaction. An optimization experiment aimed at increasing the Si3N4 content of the powders has been done with an orthogonal design of the main processing parameters, including the laser power and the gas flow rates of (Me(3)Si)(2)NH and NH3. The Si3N4 content of the powders has been raised to 70 wt.% and the corresponding processing parameters determined. The powders produced have been characterized by chemical analysis, transmission electron microscopy, IR spectroscopy and X-ray diffraction. They are white-grey in colour, free of hard agglomerates, of average particle size 20 nm and their chemical composition changed with the processing parameters.
description.departmentli, yl (reprint author), acad sinica,inst met res,state key lab rsa,shenyang 110015,peoples r china
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Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/38848
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
Y. L. Li,Y. Liang,F. Zheng,et al. LASER SYNTHESIS OF ULTRAFINE SI3N4-SIC POWDERS FROM HEXAMETHYLDISILAZANE[J]. Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing,1994,174(2):L23-L26.
APA Y. L. Li,Y. Liang,F. Zheng,&Z. Q. Hu.(1994).LASER SYNTHESIS OF ULTRAFINE SI3N4-SIC POWDERS FROM HEXAMETHYLDISILAZANE.Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing,174(2),L23-L26.
MLA Y. L. Li,et al."LASER SYNTHESIS OF ULTRAFINE SI3N4-SIC POWDERS FROM HEXAMETHYLDISILAZANE".Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing 174.2(1994):L23-L26.
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