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INTERDIFFUSION STUDY OF AMORPHOUS NI-SI MULTILAYER AT LOW-TEMPERATURE
W. H. Wang; H. Y. Bai; W. K. Wang
1993
发表期刊Journal of Applied Physics
ISSN0021-8979
卷号74期号:4页码:2471-2474
摘要Little is known about the interdiffusion in the amorphous Ni-Si multilayer due to the lack of suitable experimental method. In this paper, the interdiffusion phenomena in the amorphous Ni-Si multilayer are investigated by an in situ x-ray diffraction technique. The temperature-dependent interdiffusivity obtained by monitoring the decay of the first-order modulation peak as a function of annealing time can be described in terms of the Arrhenius relation. The effective interdiffusivities can be expressed as D(e)(T) = 2.13 X 10(-17) exp[-(0.61+/-0.02)/k(B)T] m2/s (423-613 K). A retarded interstitial diffusion mechanism is suggested to explain the diffusion process in the amorphous multilayer films.
部门归属acad sinica,int ctr mat phys,shenyang 110015,peoples r china.;wang, wh (reprint author), acad sinica,inst phys,beijing 100080,peoples r china
关键词Modulation Wavelength Silicon Diffusion Films Metals
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文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/39138
专题中国科学院金属研究所
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GB/T 7714
W. H. Wang,H. Y. Bai,W. K. Wang. INTERDIFFUSION STUDY OF AMORPHOUS NI-SI MULTILAYER AT LOW-TEMPERATURE[J]. Journal of Applied Physics,1993,74(4):2471-2474.
APA W. H. Wang,H. Y. Bai,&W. K. Wang.(1993).INTERDIFFUSION STUDY OF AMORPHOUS NI-SI MULTILAYER AT LOW-TEMPERATURE.Journal of Applied Physics,74(4),2471-2474.
MLA W. H. Wang,et al."INTERDIFFUSION STUDY OF AMORPHOUS NI-SI MULTILAYER AT LOW-TEMPERATURE".Journal of Applied Physics 74.4(1993):2471-2474.
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