PHASE SELECTION IN INTERFACIAL REACTION OF NI/AMORPHOUS SI MULTILAYERS

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	PHASE SELECTION IN INTERFACIAL REACTION OF NI/AMORPHOUS SI MULTILAYERS
	W. H. Wang; H. Y. Bai; Y. Zhang; W. K. Wang
	1993
发表期刊	Journal of Applied Physics
ISSN	0021-8979
卷号	73 期号:9 页码:4313-4318
摘要	The interfacial reaction in Ni and amorphous Si (a-Si) multilayers (Ni/a-Si) has been studied. Transmission electron microscope observation was used to monitor the progress of the solid-state reaction. It was found that amorphous Ni-silicide phase [a-(Ni,Si)] is the first phase formed in the Ni and a-Si interfacial reaction. A relatively large composition range for the amorphous phase exists in these Ni/a-Si multilayers. In the as-deposited Ni/a-Si multilayers with shorter modulation period, the uniform a-(Ni,Si) phase forms at least in the composition range of 25-62 at. % Ni. These results are consistent with predictions from the calculated Gibbs free-energy diagram. The delta-Ni2Si phase is the preferred phase in the crystallization process of a-(Ni,Si) even for the equiatomic Ni/a-Si multilayers. The mechanism that controls phase selection in the Ni/a-Si interfacial reaction is discussed using nucleation theory. A nucleation control model for phase selection is proposed.
部门归属	acad sinica,int ctr mat phys,shenyang 110015,peoples r china.;wang, wh (reprint author), acad sinica,inst phys,beijing 100080,peoples r china
关键词	Silicide Formation Amorphous-silicon Thin-films Nucleation Kinetics Systems Growth Ni2si Model
URL	查看原文
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/39140
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	W. H. Wang,H. Y. Bai,Y. Zhang,et al. PHASE SELECTION IN INTERFACIAL REACTION OF NI/AMORPHOUS SI MULTILAYERS[J]. Journal of Applied Physics,1993,73(9):4313-4318.
APA	W. H. Wang,H. Y. Bai,Y. Zhang,&W. K. Wang.(1993).PHASE SELECTION IN INTERFACIAL REACTION OF NI/AMORPHOUS SI MULTILAYERS.Journal of Applied Physics,73(9),4313-4318.
MLA	W. H. Wang,et al."PHASE SELECTION IN INTERFACIAL REACTION OF NI/AMORPHOUS SI MULTILAYERS".Journal of Applied Physics 73.9(1993):4313-4318.