ENRICHMENT TRANSFORMATION BETWEEN INDIVIDUAL ELEMENTS IN THE NEAR-NORMAL DIRECTION DURING BINARY ALLOY SPUTTERING

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	ENRICHMENT TRANSFORMATION BETWEEN INDIVIDUAL ELEMENTS IN THE NEAR-NORMAL DIRECTION DURING BINARY ALLOY SPUTTERING
	L. P. Zheng; R. S. Li; M. Y. Li; M. Chen; X. Q. Xia
	1992
发表期刊	Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
ISSN	0168-583X
卷号	71 期号:1 页码:39-43
摘要	Evolutions of angular distributions and surface composition profiles of a sputtered Pt0.5Cu0.5 alloy were simulated under 1 keV Ar ion bombardment at normal incidence, with the help of a dynamic Monte Carlo program including preferential sputtering and BIGS (bombardment-induced Gibbsian segregation) processes etc. It is found during the PtCu alloy sputtering that the Cu enrichment in the near-normal direction is regularly transformed into the Pt one as the Ar ion fluence increases. Below a low fluence of about 1.7 ions/cm2, Cu is preferentially ejected in the near-normal direction; above 1.7 ions/cm2, on the other hand, Pt is preferentially ejected in the near-normal direction instead of Cu. Effects of preferential sputtering and BIGS processes on enrichment transformation between Cu and Pt elements in the near-normal direction are also discussed.
部门归属	acad sinica,inst met res,atom imaging solids lab,shenyang 110015,peoples r china. acad sinica,inst met res,shenyang 110015,peoples r china.;zheng, lp (reprint author), acad sinica,shanghai inst nucl res,pob 800-204,shanghai 201800,peoples r china
关键词	Bombardment-induced Segregation Monte-carlo Simulation Surface Segregation Cu Implantation Depth
URL	查看原文
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/39359
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	L. P. Zheng,R. S. Li,M. Y. Li,et al. ENRICHMENT TRANSFORMATION BETWEEN INDIVIDUAL ELEMENTS IN THE NEAR-NORMAL DIRECTION DURING BINARY ALLOY SPUTTERING[J]. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,1992,71(1):39-43.
APA	L. P. Zheng,R. S. Li,M. Y. Li,M. Chen,&X. Q. Xia.(1992).ENRICHMENT TRANSFORMATION BETWEEN INDIVIDUAL ELEMENTS IN THE NEAR-NORMAL DIRECTION DURING BINARY ALLOY SPUTTERING.Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,71(1),39-43.
MLA	L. P. Zheng,et al."ENRICHMENT TRANSFORMATION BETWEEN INDIVIDUAL ELEMENTS IN THE NEAR-NORMAL DIRECTION DURING BINARY ALLOY SPUTTERING".Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms 71.1(1992):39-43.