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SPUTTERING ANGULAR-DISTRIBUTIONS OF INDIVIDUAL ELEMENTS FOR LOW-ENERGY AR ION IRRADIATION OF PTCU ALLOY
L. P. Zheng; R. S. Li; M. Y. Li; W. Z. Shen; J. Y. Lin; Z. Y. Zou
1991
发表期刊Chinese Physics Letters
ISSN0256-307X
卷号8期号:1页码:44-47
摘要The dynamic Monte Carlo program including a bombardment-induced Gibbsian segregation process was used to calculate angular distributions of individual elements from sputtered Cu0.5Pt0.5 alloy in the Ar ion energy range between 0.2 and 1.5keV. Calculated results show that for each investigated incident energy, the angular distribution of the Pt element is more forward-pointed than that of the Cu one; the reason may be that different percentage of sputtered atoms (37 approximately 45% of Pt and 12 approximately 19% of Cu) come from beneath the topmost layer.
部门归属acad sinica,inst met res,shenyang 110015,peoples r china.;zheng, lp (reprint author), acad sinica,shanghai inst nucl res,shanghai 201800,peoples r china
关键词Bombardment-induced Segregation Surface Segregation Implantation Cu
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文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/39515
专题中国科学院金属研究所
推荐引用方式
GB/T 7714
L. P. Zheng,R. S. Li,M. Y. Li,et al. SPUTTERING ANGULAR-DISTRIBUTIONS OF INDIVIDUAL ELEMENTS FOR LOW-ENERGY AR ION IRRADIATION OF PTCU ALLOY[J]. Chinese Physics Letters,1991,8(1):44-47.
APA L. P. Zheng,R. S. Li,M. Y. Li,W. Z. Shen,J. Y. Lin,&Z. Y. Zou.(1991).SPUTTERING ANGULAR-DISTRIBUTIONS OF INDIVIDUAL ELEMENTS FOR LOW-ENERGY AR ION IRRADIATION OF PTCU ALLOY.Chinese Physics Letters,8(1),44-47.
MLA L. P. Zheng,et al."SPUTTERING ANGULAR-DISTRIBUTIONS OF INDIVIDUAL ELEMENTS FOR LOW-ENERGY AR ION IRRADIATION OF PTCU ALLOY".Chinese Physics Letters 8.1(1991):44-47.
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