Simulation of ion transport characteristics in a collisionless rf sheath

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	Simulation of ion transport characteristics in a collisionless rf sheath
	Z. L. Liu; X. B. Jing; K. L. Yao
	2005
发表期刊	Journal of Physics D-Applied Physics
ISSN	0022-3727
卷号	38 期号:12 页码:1899-1904
摘要	With a self-consistent fluid model, we study the transport characteristics of the collisionless radio frequency (rf) sheath in a high density plasma and calculate the spatiotemporal ion density and the potential drop across the sheath in one rf cycle for an rf-bias frequency of 13.56 MHz. We also study the effects of the rf frequency on the voltage at the electrode, the sheath width, the ion energy distribution (IED) and the ion angular distribution (IAD) at the electrode. The simulated results indicate that the incidence angles of the ions impinging on the electrode are less than 8 degrees when the ion velocity in the direction perpendicular to the sheath field is assumed to be a Boltzmann distribution. It is concluded that the rf frequency plays a crucial role for the energy and angular distributions of ions impinging on the electrode surface, and the IED and IAD are affected by the plasma density and the rf-bias power.
部门归属	huazhong univ sci & technol, dept phys, wuhan 430074, peoples r china. chinese acad sci, int ctr mat phys, shenyang 110015, peoples r china.;liu, zl (reprint author), huazhong univ sci & technol, dept phys, wuhan 430074, peoples r china, peoples r china;zlliu@hust.edu.cn jingxb1978@163.com
关键词	Density Plasma Reactors Energy-distribution
URL	查看原文
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/40017
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Z. L. Liu,X. B. Jing,K. L. Yao. Simulation of ion transport characteristics in a collisionless rf sheath[J]. Journal of Physics D-Applied Physics,2005,38(12):1899-1904.
APA	Z. L. Liu,X. B. Jing,&K. L. Yao.(2005).Simulation of ion transport characteristics in a collisionless rf sheath.Journal of Physics D-Applied Physics,38(12),1899-1904.
MLA	Z. L. Liu,et al."Simulation of ion transport characteristics in a collisionless rf sheath".Journal of Physics D-Applied Physics 38.12(2005):1899-1904.