Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils

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	Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils
	J. H. Gao; L. Zhang; J. Q. Xiao; J. Gong; C. Sun; L. S. Wen
	2012
发表期刊	Materials Letters
ISSN	0167-577X
卷号	68 页码:367-369
摘要	A mid-frequency (MF) twin magnetron sputtering system combined with two external solenoid coils was developed to prepare nanocrystalline silicon (nc-Si) thin films. By varying the current strength of solenoid coils, different plasma conditions near substrate surface in an argon discharge were accomplished. Under different coil currents and Ar pressures, nc-Si films were successfully prepared and the maximal deposition rate reached around 30 nm/min with a power density of 1 W/cm(2). X-ray diffraction (XRD) analysis indicated that these films had a strong preferential growth along the (111) plane. The silicon film deposited at 1 Pa and 5.5 A showed a typical compact nanostructure of an nc-Si film. These results imply that the MF twin magnetron sputtering technique assisted by external magnetic fields is a potential method for the rapid deposition of high-quality nc-Si films. (C) 2011 Elsevier B.V. All rights reserved.
部门归属	[gao, junhua; zhang, lin; xiao, jinquan; gong, jun; sun, chao; wen, lishi] chinese acad sci, state key lab corros & protect, inst met res, shenyang 110016, peoples r china.;sun, c (reprint author), chinese acad sci, state key lab corros & protect, inst met res, shenyang 110016, peoples r china.;csun@imr.ac.cn
关键词	Nanocrystalline Silicon Thin Films Solenoid Coil Sputtering Microcrystalline Silicon Fabrication Deposition Layer Tool
URL	查看原文
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/59957
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	J. H. Gao,L. Zhang,J. Q. Xiao,et al. Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils[J]. Materials Letters,2012,68:367-369.
APA	J. H. Gao,L. Zhang,J. Q. Xiao,J. Gong,C. Sun,&L. S. Wen.(2012).Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils.Materials Letters,68,367-369.
MLA	J. H. Gao,et al."Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils".Materials Letters 68(2012):367-369.