Characterization and visible light germicidal efficacy of nitrogen doped TiO2 film crystallized by microwave irradiations

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	Characterization and visible light germicidal efficacy of nitrogen doped TiO2 film crystallized by microwave irradiations
	Z. G. Shang; Z. Q. Liu; Q. Li; Z. J. Wang; J. K. Shang
	2012
发表期刊	Thin Solid Films
ISSN	0040-6090
卷号	520 期号:7 页码:2429-2433
摘要	The visible light bactericidal ability of nitrogen doped TiO2 (TiON) film on Si (100) has been enhanced greatly (by 22%) through a single-mode microwave irradiation annealing (f=2.45 GHz, 20 s) in comparison with the conventional heat treatment at the same temperature (500 degrees C, 300 s). Analyses of X-ray photoelectron spectroscopy and transmission electron microscopy showed that the microwave annealed TiON film had a higher nitrogen concentration and much better crystallinity, both of which contribute to its prior bactericidal ability under visible light. The optimized annealing parameters of microwave irradiation are 500 degrees C within 20 s. Increase of annealing temperature and irradiation time resulted in the decrease of nitrogen concentration within the film. The crystallized TiON film has an anatase but not a rutile structure at the annealing temperature up to 800 degrees C. (C) 2011 Elsevier B.V. All rights reserved.
部门归属	[shang, z. g.; liu, z. q.; li, q.; wang, z. j.; shang, j. k.] chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china. [shang, j. k.] univ illinois, dept mat sci & engn, urbana, il 61801 usa.;liu, zq (reprint author), chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china.;zqliu@imr.ac.cn
关键词	Titanium Oxinitride Bactericidal Property Microwave Annealing Cyrstallization Transmission Electron Microscopy Thin-films Titanium-dioxide Photocatalytic Activity Deposition Method Water Oxidation Origin
URL	查看原文
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/60206
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Z. G. Shang,Z. Q. Liu,Q. Li,et al. Characterization and visible light germicidal efficacy of nitrogen doped TiO2 film crystallized by microwave irradiations[J]. Thin Solid Films,2012,520(7):2429-2433.
APA	Z. G. Shang,Z. Q. Liu,Q. Li,Z. J. Wang,&J. K. Shang.(2012).Characterization and visible light germicidal efficacy of nitrogen doped TiO2 film crystallized by microwave irradiations.Thin Solid Films,520(7),2429-2433.
MLA	Z. G. Shang,et al."Characterization and visible light germicidal efficacy of nitrogen doped TiO2 film crystallized by microwave irradiations".Thin Solid Films 520.7(2012):2429-2433.