Influence of Nitrogen Flow Ratio on the Microstructure, Composition, and Mechanical Properties of DC Magnetron Sputtered Zr-B-O-N Films

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	Influence of Nitrogen Flow Ratio on the Microstructure, Composition, and Mechanical Properties of DC Magnetron Sputtered Zr-B-O-N Films
	T. G. Wang; Y. M. Liu; T. F. Zhang; D. I. Kim; K. Kim
	2012
发表期刊	Journal of Materials Science & Technology
ISSN	1005-0302
卷号	28 期号:11 页码:981-991
摘要	Nanocrystalline ZrB2 film and nanocomposite Zr-B-O-N films were prepared by non-reactive as well as reactive magnetron sputtering techniques, respectively. By means of X-ray diffraction analysis, electron probe microanalysis, X-ray photoelectron spectroscopy, and scanning electron microscopy, the influence of nitrogen flow ratio on the film microstructure and characteristics were investigated systematically, including the deposition rate, chemical compositions, phase constituents, grain size, chemical bonding, as well as cross-sectional morphologies. Meanwhile, the hardness and adhesion of above films were also evaluated by micro-indentation method and a scratch tester. With increasing the nitrogen flow ratio, the deposition rate of above films decreased approximately linearly, whereas the contents of N and O in the films increased gradually and tended to saturation. Moreover, the film microstructure was also altered gradually from a fine columnar microstructure to a featureless glass-structure. As the nitrogen flow ratio was 11.7%, the Zr-B-O-N film possessed an typical nanocomposite structure and presented good mechanical properties. During the process of reactive sputtering of metal borides, the introduction of nitrogen can show a pronounced suppression of columnar grain growth and strong nanocomposite structure forming ability.
部门归属	[wang, tie-gang; zhang, tengfei; kim, doo-in; kim, kwangho] pusan natl univ, natl core res ctr hybrid mat solut, pusan 609735, south korea. [wang, tie-gang] chinese acad sci, inst met res, state key lab corros & protect, shenyang 110016, peoples r china. [liu, yanmei] chinese acad sci, inst met res, anal & testing div, shenyang 110016, peoples r china.;kim, k (reprint author), pusan natl univ, natl core res ctr hybrid mat solut, pusan 609735, south korea.;kwhokim@pusan.ac.kr
关键词	Films Dc Magnetron Sputtering Nanocomposite Microhardness Adhesion Thin-films Cr-b Electrical-properties Coatings Target Deposition Growth Si Nitride Silicon
URL	查看原文
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/60308
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	T. G. Wang,Y. M. Liu,T. F. Zhang,et al. Influence of Nitrogen Flow Ratio on the Microstructure, Composition, and Mechanical Properties of DC Magnetron Sputtered Zr-B-O-N Films[J]. Journal of Materials Science & Technology,2012,28(11):981-991.
APA	T. G. Wang,Y. M. Liu,T. F. Zhang,D. I. Kim,&K. Kim.(2012).Influence of Nitrogen Flow Ratio on the Microstructure, Composition, and Mechanical Properties of DC Magnetron Sputtered Zr-B-O-N Films.Journal of Materials Science & Technology,28(11),981-991.
MLA	T. G. Wang,et al."Influence of Nitrogen Flow Ratio on the Microstructure, Composition, and Mechanical Properties of DC Magnetron Sputtered Zr-B-O-N Films".Journal of Materials Science & Technology 28.11(2012):981-991.