柔性基材ITO透明导电膜的制备及性能研究

IMR OpenIR

	柔性基材ITO透明导电膜的制备及性能研究
	宫骏
学位类型	博士
导师	闻立时
	2010
学位授予单位	中国科学院金属研究所
学位授予地点	北京
学位专业	材料加工工程
关键词	柔性基材透明导电膜磁控溅射 Ito
摘要	"本论文以柔性显示用ITO薄膜为研究背景，选用PET聚酯膜为基材，采用中频磁控溅射工艺在PET聚酯膜上分别制备了SixOy和Al2O3阻挡层，采用直流磁控溅射分别在PET聚酯膜和100nm厚玻璃基材上制备ITO薄膜，研究了薄膜厚度、基体温度、气体流量等工艺参数对薄膜的光电性能、表面形貌及力学性能的影响。研究表明，中频磁控溅射制备的SixOy和Al2O3均是非晶薄膜，在可见和红外区的透过率达到80%以上，对氧和水蒸气具有良好的阻挡效果，可以提高聚合物基材的气密性3个数量级左右。制备的ITO薄膜具有高度可见光透过率和电导率，提高氧流量可以提高可见光透过率，但电导率会相应下降；提高基底温度可以提高ITO薄膜的电导率，退火处理也可以显著提高ITO薄膜的电导率。在PET基体上较低的沉积温度下ITO薄膜更易形成非晶或非晶与多晶的混合结构，在玻璃基材上ITO薄膜更易形成多晶结构。以ITO薄膜为底阳极制备出ITO/NPB/Alq3/LiF/Al结构的有机发光二极管具有良好的发光效果，在相同的驱动电压下，其电流密度和发光亮度均明显高于用市场商用ITO玻璃所制备的器件。"
其他摘要	"In this work, the research backguround is ITO films on flexible substrates for flexible display.Flexible PET were selected as substrates for depositing ITO films. SiOxNy and Al2O3 films as a barrier for PET substrates have been successfully prepared by MF reactive magnetron sputtering. ITO films with high transmittance were prepared on PET and 100nm thick glass substrates by DC magnetron sputtering. The dependence of diverse properties of the films, such as optical property, mechanical property and surface morphology, on deposition parameters involving substrates temperature, gas flow, films thickness have also been studied in detail. The results revealed that SiOxNy and Al2O3 films prepared by MF reactive magnetron sputtering are amorphous, and tis transmittance is more than 80％in visible and near-infrared region. The SiOxNy and Al2O3 barrier can prevent oxygen and humidity, decreased the permeation to one in a thousand. ITO films with high transmittance and conductivity were prepared on PET and 100nm thick glass substrates by DC magnetron sputtering. The visible light transmittance can be improved by increasing oxygen flow, but will be a corresponding drop in conductivity. Annealing treatment can significantly improve the conductivity of ITO film. At low substrates temperature, it is easier to form an amorphous structure ITO films on PET substrates, to form polycrystalline structure on glass substrates. ITO films were employed as the anode to fabricate organic light-emitting diode (OLED) with ITO/NPB/Alq3/LiF/Al configuration. The OLED device has a good performance. In the same drive voltage, the current density and brightness were significantly higher than that made by commercial ITO glass."
文献类型	学位论文
条目标识符	http://ir.imr.ac.cn/handle/321006/64159
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	宫骏. 柔性基材ITO透明导电膜的制备及性能研究[D]. 北京. 中国科学院金属研究所,2010.