有机硅/SiO2和聚硅氮烷涂层的制备及其抗原子氧与真空紫外侵蚀性能研究

IMR OpenIR

	有机硅/SiO2和聚硅氮烷涂层的制备及其抗原子氧与真空紫外侵蚀性能研究
	胡龙飞
学位类型	博士
导师	李美栓
	2010
学位授予单位	中国科学院金属研究所
学位授予地点	北京
学位专业	材料学
关键词	原子氧真空紫外防护涂层
摘要	"本工作在建立一套空间综合环境地面模拟装置的基础上，重点对有机硅/SiO2杂化涂层以及新研制聚硅氮烷涂层的抗AO、VUV侵蚀性能进行了系统研究。综合空间环境地面模拟装置能够模拟原子氧、真空紫外、热循环三种空间环境因素。利用该装置可以获得高通量、大直径的AO束流，AO通量范围1015 ~ 1017 atoms×cm-2×s-1，能量约为5 eV。真空紫外强度和热循环范围分别为0 ~ 7个太阳数和-196oC ~ +200oC。该装置配置了四极质谱仪和石英晶体微天平，具有原位监测挥发性气体种类和测量暴露试样质量变化的功能。有机硅SiO2杂化涂层和磁控溅射的Si1-x-yCxNy涂层在AO暴露过程中显示出良好的抗侵蚀性能，但是在AO、VUV同时暴露下，这两种涂层的侵蚀速率均有所升高。制备了一种具有良好抗AO、VUV侵蚀性能的新型聚硅氮烷（PSZ）涂层。通过添加聚硅硼烷对聚硅氮烷涂层进行了改性。改性后的涂层表的氧化层变为玻璃相，使涂层具有自愈合性能，从而降低了涂层表面的开裂趋势和AO侵蚀速率。此外，还制备了全氢聚硅氮烷涂层，进一步提高了涂层的抗侵蚀能力。对有机硅/20 wt.%SiO2杂化涂层和Si0.26C0.43N0.31涂层进行了不同通量的AO暴露，分析了AO束流通量对涂层抗AO侵蚀性能的影响，提出了涂层AO侵蚀系数随AO束流通量变化的一种预测模型，并对预测模型的合理性进行了初步验证。"
其他摘要	"In this work, a ground-based simulator has been established in our laboratory, in which AO beam with high flux, VUV radiation and thermal cycling can be achieved. By using this simulator, the AO and VUV erosion resistance of polysiloxane/SiO2 hybrid coatings and a novel polysilazane coating are systematically investigated. A simulated LEO environment involving in AO，VUV and thermal cycling can be generated in the ground-based simulator. The generated AO beam has large dimension and high flux. The AO flux is calibrated to be 1015 ~ 1017 atoms×cm-2×s-1, and the kinetic energy of oxygen atoms is about 5 eV. The VUV intensity and thermal cycling in the simulator is in the range of 0 ~ 7 suns and -196oC ~ +200oC, respectively. Moreover, a quadrupole mass spectrometer and a quartz crystal microbalance are equipped in the simulator, correspondingly the volatile gases and sample mass change can be in-situ measured during exposure test. Polysiloxane/SiO2 hybrid coatings and Si1-x-yCxNy coatings were deposited on Kapton substrate. These two coatings present good resistance in AO exposure. But their erosion rate increase slightly in simultaneous AO and VUV exposure. A novel polysilicone -polysilazane (PSZ) has been prepared as a potential AO resistant coating. This coating possesses better AO and VUV resistance than traditional polysiloxane coatings. In order to further improve the AO resistance, the PSZ coating was modified through adding polyborazane (PBZ). During AO exposure, a glass layer can easily forms on the modified PSZ coating, which endows the modified PSZ coating with self-healing property and reduced erosion rate. Moreover, a polyhydropolysilazane (PHPS) coating is prepared, which exhibits better AO erorion resistance. The influences of AO flux on the erosion yield of the polysiloxane/20 wt.% SiO2 hybrid coating and the Si0.26C0.43N0.31 coating were studied. Base on the experimental results, a theoretical model has been proposed to predict the lifetime of the coatings under low flux and long duration exposure according to the results obtained in the ground-based simulating tests. The reliability of this model is preliminary verified."
文献类型	学位论文
条目标识符	http://ir.imr.ac.cn/handle/321006/64165
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	胡龙飞. 有机硅/SiO2和聚硅氮烷涂层的制备及其抗原子氧与真空紫外侵蚀性能研究[D]. 北京. 中国科学院金属研究所,2010.